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首页> 外文期刊>Optical Engineering >Multiwavelength fringe scanning profilometry for wide gapped sample
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Multiwavelength fringe scanning profilometry for wide gapped sample

机译：用于宽间隙样品的多波长条纹扫描轮廓仪

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摘要

A technique for measuring shapes containing gaps that combines optical fringe scanning with the fractional fringe order method is presented. The basic configuration is a Twyman-Green interferometer with collimated white-light illumination. The reference mirror is moved using a piezoelectric transducer at a phase interval of π/2 during the measurement, and the fringe image is collected at every step. The surface shape is reconstructed by a four-frame scanning algorithm for each pixel for each selected wavelength. The absolute gap height is then identified by the fractional fringe order method, which can detect the 2π phase jumps accurately. The simultaneous measurement of both a gap of several wavelengths and a surface shape is also demonstrated. Finally, the influences of the spectral bandwidth of light and the central wavelength used in recording interferograms are discussed.
机译：提出了一种将光学条纹扫描与分数条纹阶数方法相结合的包含间隙的形状测量技术。基本配置是具有准直白光照明的 Twyman-Green 干涉仪。在测量过程中，使用压电换能器以 π/2 的相位间隔移动参考镜，并在每一步收集条纹图像。对于每个选定波长的每个像素，通过四帧扫描算法重建表面形状。然后通过分数条纹阶法识别绝对间隙高度，可以准确检测2π相位跳跃。还演示了同时测量多个波长的间隙和表面形状。最后，讨论了用于记录干涉图的光的光谱带宽和中心波长的影响。

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