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Development of nonimaging optics for particle counters

机译：用于粒子计数器的非成像光学器件的开发

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A nonimaging optical system is developed for particle detection in an optical particle counter (OPC) with a large measurement plane, the kind of OPC required to control particle contamination in clean process gases used in chip manufacture. The measurement plane must cover the whole cross section of the gas pipe to be able to detect each particle. In a conventional OPC with imaging detection optics, local dependence of the particle signal is caused by the inhomogeneity of light intensity in the measurement plane as well as by local dependence of the angle of the detected scattered light. However, most important is the local signal dependence caused by the imaging detection optics. Using nonimaging elements reduces local dependence of the scattered light signal which is caused by the imaging optics. The work carried out on nonimaging light concentrators for particle detection is described. We discuss the advantages of using light concentrators, summarize the optical theory of light concentration and investigate the optical characteristics of light concentrators. Through theoretical as well as experimental tests, we show that the local deviation is less than ±25.6 for a homogenous light intensity distribution in the measurement plane.
机译：开发了一种非成像光学系统，用于在具有大测量平面的光学粒子计数器 （OPC） 中进行颗粒检测，这是一种控制芯片制造中使用的清洁工艺气体中的颗粒污染所需的 OPC。测量平面必须覆盖气体管道的整个横截面，以便能够检测到每个颗粒。在具有成像检测光学器件的传统OPC中，粒子信号的局部依赖性是由测量平面中光强度的不均匀性以及检测到的散射光角度的局部依赖性引起的。然而，最重要的是成像检测光学器件引起的局部信号依赖性。使用非成像元件可减少由成像光学器件引起的散射光信号的局部依赖性。描述了在用于粒子检测的非成像聚光器上进行的工作。我们讨论了使用聚光器的优点，总结了光集中的光学理论，并研究了聚光器的光学特性。通过理论和实验测试，我们发现测量平面中均匀光强分布的局部偏差小于±25.6%。

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