The enhanced conductivity of AZO thin films on soda lime glass with an ultrathin Al_2O_3 buffer layer

Lu L.; Shen H.; Jiang F.Yang C.Lin L.

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The enhanced conductivity of AZO thin films on soda lime glass with an ultrathin Al_2O_3 buffer layer

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Aluminum doped zinc oxide (AZO) films were deposited by radio frequency (RF) magnetron sputtering on the Al_2O_3-coated and bare soda lime glass substrates, respectively. The properties of AZO films were analyzed using X-ray diffraction (XRD), atomic force microscope (AFM), Hall effect measurement and ultravioletvisible (UVvis) spectrophotometer. The results of XRD measurement showed that all the AZO thin films had a preferentially oriented (0 0 2) peak and the intensity of (0 0 2) peak decreased with increase in the thickness of the Al_2O_3 buffer layer. The Hall measurement results showed that the conductivity of the AZO film with a 3 nm Al_2O_3 buffer layer had a remarkable 41.3 increase when compared with that of the single AZO film. The figures of merit from optical transmittance and electrical conductivity for AZO films on the 3 nm Al _2O_3-coated and bare glass substrates were 5466 and 3772 S cm~(-1), respectively. All the results suggested that the use of an ultrathin Al_2O_3 buffer layer effectively improved the quality of AZO film on the glass substrate.

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《Physica, B. Condensed Matter》 |2010年第16期|3320-3323|共4页
作者
Lu L.; Shen H.; Jiang F.Yang C.Lin L.;
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作者单位

College of Materials Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing, China;

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原文格式 PDF
正文语种英语
中图分类物理学;
关键词
Al_2O_3 buffer layer; AZO; Conductivity; Optical transmittance;

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The enhanced conductivity of AZO thin films on soda lime glass with an ultrathin Al_2O_3 buffer layer

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