Films of Er2O3 grown on Si(111) substrates by rf-magnetron sputtering were characterized by synchrotron radiation X-ray diffraction and photoluminescence spectroscopy in spectral and time domains. We measured the photoluminescence and the intensity ratio of the peaks in the photoluminesence as a function of temperature at the excitation wavelength of 800 nm. We determined the energy levels of Er3+ ions in poly crystal Er2O3 and revealed energy transfers from C-2 to C-3i sites in the Er2O3 on the basis of a simple theory. (C) 2012 The Japan Society of Applied Physics
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