A surface-ionization method is developed for measuring the integral yields of neutral particles sputtered under the effect of ion bombardment. An investigation is performed to compare the integral yield of particles sputtered upon bombarding indium with Bi _m ~+ cluster ions (m = 1-7) in the energy range of 2-10 keV and the secondary ion emission under bombardment with Bi _m ~- cluster ions (m = 1-5) in the energy range of 6-18 keV. A nonadditive increase in the indium sputtering coefficient is observed with an increasing number of atoms in the bombarding clusters.
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