Thin films of hexagonal boron nitride mixed with copper (h-BN/Cu) were prepared under different depositing conditions. Their surface morphology, internal stress and surface free energy were measured. Many nanometer-sized island structures grew on the surface of the films and their size increased as the deposition time. The values of internal stress and the surface free energy drastically changed with substrate temperature during deposition. The possibility was shown of controlling the thin film properties extensively and of applying it to fabricate friction-controlled materials and reaction-controlled catalysis.
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