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机译:
Univ Lorraine, Inst Jean Lamour IJL, UMR 7198, CNRS, F-54011 Nancy, France;
Univ Nantes, Inst Mat Jean Rouxel IMN, UMR 6502, F-44035 Nantes, France;
FrecInIsys SAS, F-25000 Besancon, FranceUniv Lorraine, Cent Supelec, F-54052 Metz, France;
Sensors; surface acoustic waves; resonators; aluminium nitride; high temperature;