Comparison of Analytical and Numerical Methods of Obtaining Coplanar Capacitance of Microelectrodes for Particulate Matter Detection

Oluwasanya Pelumi W.; Rughoobur Girish; Occhipinti Luigi G.

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Comparison of Analytical and Numerical Methods of Obtaining Coplanar Capacitance of Microelectrodes for Particulate Matter Detection

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This work reports a comparative analysis between the analytical and the finite element modelling, for the calculation of the capacitance of microelectrode-based capacitors in both parallel and coplanar architecture. It shows that the inverse-cosine and the Schwartz-Christoffel methods underestimate the capacitance value of the coplanar plate capacitor. It also shows that the parallel architecture closed form solution and the finite element modelling results agree well in all cases. The work finally compares the effects of design parameter change of the microelectrodes on the capacitance obtained from each technique. It shows that finite element modelling provides the best estimate of the capacitance of a coplanar plate capacitor.

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来源
《IEEE sensors journal》 |2020年第15期|8631-8636|共6页
作者
Oluwasanya Pelumi W.; Rughoobur Girish; Occhipinti Luigi G.;
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作者单位

Univ Cambridge, Dept Engn, Elect Engn Div, Cambridge CB3 0FA, England;

MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA;

Univ Cambridge, Dept Engn, Cambridge CB3 0FA, England;

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原文格式 PDF
正文语种英语
中图分类电工技术;
关键词
Capacitance; Finite element analysis; Capacitive sensors; Capacitors; Microelectrodes; Capacitive PM2; 5 sensor; finite element modeling; conformal mapping; inverse-cosine transformation; microelectrodes;

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Comparison of Analytical and Numerical Methods of Obtaining Coplanar Capacitance of Microelectrodes for Particulate Matter Detection

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