Fabry-Perot interferometer utilized for displacement measurement in a large measuring range

Yung-Cheng Wang; Lih-Horng Shyu; Chung-Ping Chang

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Fabry-Perot interferometer utilized for displacement measurement in a large measuring range

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The optical configuration of a Fabry-Perot interferometer is uncomplicated. This has already been applied in different measurement systems. For the displacement measurement with the Fabry-Perot interferometer, the result is significantly influenced by the tilt angles of the measurement mirror in the interferometer. Hence, only for the rather small measuring range, the Fabry-Perot interferometer is available. The goal of this investigation is to enhance the measuring range of Fabry-Perot interferometer by compensating the tilt angles. To verify the measuring characteristic of the self-developed Fabry-Perot interferometer, some comparison measurements with a reference standard have been performed. The maximum deviation of comparison experiments is less than 0.3 (mu)m in the traveling range of 30 mm. The experimental results show that the Fabry-Perot interferometer is highly stable, insensitive to environment effects, and can meet the measuring requirement of the submicrometer order.

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来源
《Review of Scientific Instruments》 |2010年第9期|093102-1-093102-3|共3页
作者
Yung-Cheng Wang; Lih-Horng Shyu; Chung-Ping Chang;
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作者单位

Institute of Mechanical Engineering, National Yunlin University of Science and Technology, Douliou, Yunlin 640, Taiwan;

Institute of Mechanical and Electro-Mechanical Engineering, National Formosa University, Huwei, Yunlin 632, Taiwan;

Department of Mechanical Engineering, National Central University, Jhongli. Taoyuan 320, Taiwan;

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Fabry-Perot interferometer utilized for displacement measurement in a large measuring range

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