X-ray Diffraction Characterization of Epitaxial CVD Diamond Films with Natural and Isotopically Modified Compositions

Prokhorov I. A.; Voloshin A. E.; Ralchenko V. G.Bolshakov A. P.Romanov D. A.Khomich A. A.Sozontov E. A.

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X-ray Diffraction Characterization of Epitaxial CVD Diamond Films with Natural and Isotopically Modified Compositions

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Comparative investigations of homoepitaxial diamond films with natural and modified isotopic compositions, grown by chemical vapor deposition (CVD) on type-Ib diamond substrates, are carried out using double-crystal X-ray diffractometry and topography. The lattice mismatch between the substrate and film is precisely measured. A decrease in the lattice constant on the order of (Delta a/a)(relax) similar to (1.1-1.2) x 10(-4) is recorded in isotopically modified C-13 (99.96) films. The critical thicknesses of pseudomorphic diamond films is calculated. A significant increase in the dislocation density due to the elastic stress relaxation is revealed by X-ray topography.

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《Crystallography reports》 |2016年第6期|979-986|共8页
作者
Prokhorov I. A.; Voloshin A. E.; Ralchenko V. G.Bolshakov A. P.Romanov D. A.Khomich A. A.Sozontov E. A.;
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Bauman Moscow State Tech Univ, Kaluga Branch, Kaluga 248000, Russia;

Russian Acad Sci, Prokhorov Gen Phys Inst, Moscow 119991, Russia;

Kurchatov Inst, Natl Res Ctr, Moscow 123182, RussiaRussian Acad Sci, Kaluga Branch, Fed Sci Res Ctr Crystallog & Photon, Space Mat Sci Lab,Shubnikov Inst Crystallog, Kaluga 248640, RussiaRussian Acad Sci, Fed Sci Res Ctr Crystallog & Photon, Shubnikov Inst Crystallog, Moscow 119333, Russia;

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中图分类晶体学;
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X-ray Diffraction Characterization of Epitaxial CVD Diamond Films with Natural and Isotopically Modified Compositions

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