UHV application of springhyphen;loaded Teflon seals

Daniel J. Auerbach; Charles A. Becker; James P. CowinLennard Wharton

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UHV application of springhyphen;loaded Teflon seals

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Large, bakeable, rotatable ultrahigh vacuum seals capable of operation at 10minus;11Torr are described. They employ doubly differentially pumped commercially available springhyphen;loaded Teflon seals. A static version is very convenient for quick access as it requires nearly negligible sealing force other than atmospheric force.

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《review of scientific instruments》 |1978年第11期|1518-1519|共页
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Daniel J. Auerbach; Charles A. Becker; James P. CowinLennard Wharton;
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UHV application of springhyphen;loaded Teflon seals

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