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首页> 外文期刊>Fortschritt-Berichte VDI, Reihe 8. Mess-, Steuerungs- und Regelungstechnik >3D-Probing System for Micro-Components
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3D-Probing System for Micro-Components

机译：微型零件3D探测系统

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摘要

In this thesis a new 3D-probing system is presented. Its design is not only optimised for isotropic stiffnesses at the probing element, but also for an economically priced manufacturing and assembly. For designing the geometry of the probing system, a procedure based on the Finite Element Method (FEM) is presented and checked by force measurements. Therewith it is possible to determine the stiffnesses at the probing element by simulations and adapt those to given specifications before the probing system is realised. By means of this design tool and due to the measurement principle it is possible to adjust the probing system to different measuring tasks and applications, e.g. as probing system for micro-coordinate measuring machines (CMM's), for conventional CMM's or for machine tools. The geometric checking of the probing system comprises measurements to determine specifications such as the linearity error, the maximum permissible probing error or the repeatability.
机译：本文提出了一种新的3D探测系统。它的设计不仅针对探测元件的各向同性刚度进行了优化，而且还针对经济价位的制造和组装进行了优化。为了设计探测系统的几何形状，提出了一种基于有限元方法（FEM）的程序，并通过力测量对其进行了检查。因此，可以通过模拟确定探测元件处的刚度，并使刚度适应给定规格，然后再实现探测系统。借助于该设计工具并且由于测量原理，可以将探测系统调整为适合于不同的测量任务和应用，例如测量系统。作为微坐标测量机（CMM），常规CMM或机床的探测系统。探测系统的几何检查包括确定规格的测量，例如线性误差，最大允许探测误差或可重复性。

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