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Effect of Voltage Supply Mode on Electrolytic Machining of Polycrystalline Silicon

机译：供电方式对多晶硅电解加工的影响

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摘要

Wire electric discharge machining (WEDM) of polycrystalline silicon (polysilicon) involves high-temperature melting that easily produces cracks on the wafer surface. This study explored the removal of surface defects by electrolytic machining (EM) to enhance surface quality. EM of polysilicon was conducted under different voltage supply modes, namely, DC voltage (DC-V), pulse voltage (Pulse-V), and auxiliary pulse voltage (Auxiliary-P-V) to examine their effects on material removal (MR) and surface roughness (SR). Results show that poor surface quality was achieved by EM with DC-V mode due to accumulation of bubbles between electrode gaps and inefficient MR. In contrast, EM with Pulse-V supply can reduce SR by proper control of pulse voltage cycle through adjustment in pulse-on and pulse-off time to ensure good replenishment of electrolyte. Finally, adding an optimal auxiliary voltage to the pulse cycle contributes to EM stability. Hence, EM with Auxiliary-P-V supply is an effective approach to electrolytic machining of WEDMed polysilicon. Not only is high MR achieved, but good surface quality is also maintained.
机译：多晶硅的电火花线切割加工（WEDM）涉及高温熔化，该熔化容易在晶片表面产生裂纹。这项研究探索了通过电解加工（EM）去除表面缺陷以提高表面质量的方法。多晶硅的EM是在不同的电压供应模式下进行的，分别是DC电压（DC-V），脉冲电压（Pulse-V）和辅助脉冲电压（Auxiliary-PV），以检查它们对材料去除（MR）和表面的影响粗糙度（SR）。结果表明，由于电极间隙之间的气泡堆积和效率低下的MR，采用DC-V模式的EM可获得较差的表面质量。相比之下，带有Pulse-V电源的EM可以通过调整脉冲接通和断开时间来适当控制脉冲电压周期，从而降低SR，以确保良好的电解液补充。最后，在脉冲周期中添加最佳辅助电压有助于提高EM稳定性。因此，带有辅助P-V电源的EM是电解加工WEDMed多晶硅的有效方法。不仅实现了高MR，而且还保持了良好的表面质量。

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