An ECR ion source is converted to produce a beryllium fluoride beam, which will be stripped to ↑(7)Be↑(+2) beam and used in ↑(7)Be(p,γ)↑(8)B experiments at ISAC. The source consists of an injection chemical chamber and a plasma chamber. Chemically purified (99.9) BeO is placed in the chemical chamber which can be heated up to 1000 ℃. A CF↑(4) leak connected to that chamber serves as the source of CF↑(4) for the reaction to produce BeF↓(2). The BeF↑(2) is then injected into the hot electron layer region of the plasma chamber to enhance the ionization efficiency. A detailed source description, beam parameters and ionization efficiency measurements are presented in this paper. # 1998 American Institute of Physics. S0034-6748(98)61302-2
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