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Principle and characteristics of microparts self- alignment using liquid surface tension

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This paper describes the self-alignment principle andcharacteristics using liquid surface tension for the assembly ofmicroparts. In the principle, the attractive force caused by liquidsurface tension is used and servomechnanisms which are too largeto align microparts are not required. The surface of each micropartis divided into two kinds of areas: the wettability of one area ishigher than that of the other. Using the microparts, the self-alignment is realized as follows: (1) first, a drop of liquid is put onhigh wettability surface area of the first part, (2) next, the secondpart is put on the first one, (3) and then the second part is movedby the surface tension of the liquid so that the wettability areapattern of the first part overlaps with that of the second one, (4)finally, the alignment is accomplished. In this paper, water is usedas the liquid. The effects of the water volume change, the positionand angle changes of the second part before the alignment on thealignment accuracy are examined experimentally. The experimentalresults prove that the average of the final alignment errorsbecomes less than 10#mu#m even if an initial alignment error is 100#mu#m.

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  • 专利
  • 1. MICROPART ALIGNMENT. [P] . 外国专利： NL2004218C2 . 2011-08-11

    机译：MICROPART ALIGNMENT。

  • 2. MICROPART ALIGNMENT. [P] . 外国专利： NL2004218C . 2011-08-11

    机译：MICROPART ALIGNMENT。

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