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Fabrication of self-sealed circular nano/microfluidic channels in glass substrates

机译：在玻璃基板中自密封圆形纳米/微流体通道的制备

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摘要

We realized self-sealing fluidics channels with circular cross-sections having diameters ranging between 30 and 2000 nm on a 200 mm glass wafer through CMOS compatible processes. Lateral voids were narrowed and sealed with non-conformal plasma enhanced chemical vapour deposition (PECVD) of phospho silicate glass (PSG) along silicon oxide trenches on silicon wafers. Leveraging on the reflow properties of PSG, circular profiled-channels were formed after undergoing high temperature annealing. These devices were subsequently transferred onto a borosilicate glass substrate through anodic bonding, and a fully transparent microfluidic device was achieved with the complete removal of the handle silicon substrate. The process offers a means of integrating electrochemical and optical sensing on the same platform, for biological research.
机译：我们通过CMOS兼容工艺在200 mm玻璃晶圆上实现了直径为30到2000 nm的圆形横截面的自密封射流通道。沿硅晶片上的氧化硅沟槽，将横向空隙缩小并用磷硅酸玻璃（PSG）的非保形等离子体增强化学气相沉积（PECVD）进行密封。利用PSG的回流特性，高温退火后形成了圆形轮廓通道。随后通过阳极键合将这些器件转移到硼硅酸盐玻璃衬底上，并在完全去除操作硅衬底的情况下获得了完全透明的微流体器件。该过程提供了一种在同一平台上集成电化学和光学传感的方法，用于生物学研究。

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