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Magnetic nanostructures fabricated by the atomic force microscopy nano-lithography technique

机译:通过原子力显微镜纳米光刻技术制备的磁性纳米结构

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摘要

A local oxidation technique using atomic force microscopy (AFM) was performed in order to modify magnetic domain structures in ferromagnetic nanostructures. Co-based nanostructures with a rectangular shape were fabricated by using electron beam lithography followed by AFM nano-oxidation. After fabricating a Co-oxide nanowire across a Co nanodot by AFM nano-oxidation, a domain structure of the dot observed before the nano-oxidation was divided into two parts of the domain. AFM nano-oxidation for a higher aspect ratio of height/width of the fabricated nanostructures was also investigated. By applying a do bias between an Al2O3/Ni double layer film and the AFM tip, the Ni layer was locally oxidized through the capped Al2O3 insulating layer. The nanowires of oxide obtained on the Al2O3/Ni double layer film were thicker and had a higher aspect ratio of height/width than those obtained on a Ni single layer film.
机译:为了修改铁磁纳米结构中的磁畴结构,进行了使用原子力显微镜(AFM)的局部氧化技术。通过使用电子束光刻,然后进行AFM纳米氧化,制造出具有矩形形状的Co基纳米结构。在通过AFM纳米氧化法跨Co纳米点制造Co-氧化物纳米线之后,在纳米氧化之前观察到的点的畴结构被分成畴的两个部分。还对制造的纳米结构的高/宽高比的AFM纳米氧化进行了研究。通过在Al2O3 / Ni双层膜和AFM尖端之间施加do偏压,Ni层通过覆盖的Al2O3绝缘层被局部氧化。与在Ni 2单层膜上获得的纳米线相比,在Al 2 O 3 / Ni双层膜上获得的氧化物纳米线更厚并且具有更高的纵横比。

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