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Dimensional metrology for nanometre-scale science and engineering: towards sub-nanometre accurate encoders

机译：纳米级科学和工程的尺寸计量：朝亚纳米级精确编码器发展

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Metrology is the science and engineering of measurement. It has played a crucial role in the industrial revolution at the milli-inch length scale and in the semiconductor revolution at the micrometre length scale. It is often proclaimed that we are standing at the threshold of another industrial revolution, brought by the advent and maturing of nanotechnology. We argue that for nanotechnology to have a similarly revolutionary effect a metrology infrastructure at and below the nanometre scale is instrumental and has yet to be developed. This paper focuses on dimensional metrology, which concerns itself with the measurement of lengths and its applications such as pattern placement and feature size control. We describe our efforts to develop grating- and grid-based scales with sub-nanometre accuracy over 300 mm dimensions using the nanoruler--a scanning-beam interference lithography tool.
机译：计量学是测量的科学和工程学。它在毫米级长度的工业革命和微米级长度的半导体革命中发挥了至关重要的作用。人们常常宣称，由于纳米技术的出现和成熟，我们正处于另一场工业革命的门槛。我们认为，要使纳米技术具有类似的革命性作用，纳米级及以下的计量基础设施将发挥作用，并且尚待开发。本文着重于尺寸计量学，它涉及长度的测量及其应用，例如图案放置和特征尺寸控制。我们描述了我们使用纳米标尺-扫描光束干涉光刻工具开发具有300毫米尺寸亚纳米精度的基于光栅和网格的标尺的努力。

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