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Controlling thin film structure for the dewetting of catalyst nanoparticle arrays for subsequent carbon nanofiber growth

机译：控制薄膜结构以用于催化剂纳米颗粒阵列的去湿以用于随后的碳纳米纤维生长

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Vertically aligned carbon nanofiber (CNF) growth is a catalytic chemical vapor deposition process in which structure and functionality is controlled by the plasma conditions and the properties of the catalyst nanoparticles that template the fiber growth. We have found that the resultant catalyst nanoparticle network that forms by the dewetting of a continuous catalyst thin film is dependent on the initial properties of the thin film. Here we report the ability to tailor the crystallographic texture and composition of the nickel catalyst film and subsequently the nanoparticle template by varying the rf magnetron sputter deposition conditions. After sputtering the Ni catalyst thin films, the films are heated and exposed to an ammonia dc plasma, to chemically reduce the native oxide on the films and induce dewetting of the film to form nanoparticles. Subsequent nanoparticle treatment in an acetylene plasma at high substrate temperature results in CNF growth. Evidence is presented that the texture and composition of the nickel thin film has a significant impact on the structure and composition of the formed nanoparticle, as well as the resultant CNF morphology. Nickel films with a preferred (111) or (100) texture were produced and conditions favoring interfacial silicidation reactions were identified and investigated. Both compositional and structural analysis of the films and nanoparticles indicate that the properties of the as-deposited Ni catalyst film influences the subsequent nanoparticle formation and ultimately the catalytic growth of the carbon nanofibers.
机译：垂直排列的碳纳米纤维（CNF）生长是一种催化化学气相沉积工艺，其结构和功能受等离子体条件和模板化纤维生长的催化剂纳米颗粒的特性控制。我们已经发现，通过连续催化剂薄膜的去湿而形成的所得催化剂纳米粒子网络取决于薄膜的初始性质。在这里，我们报告了通过改变射频磁控溅射沉积条件来调整镍催化剂膜以及随后的纳米粒子模板的晶体织构和组成的能力。在溅射Ni催化剂薄膜后，将薄膜加热并暴露于氨dc等离子体中，以化学还原薄膜上的天然氧化物并诱导薄膜去湿以形成纳米颗粒。随后在高基板温度下在乙炔等离子体中进行纳米粒子处理会导致CNF生长。证据表明，镍薄膜的质地和组成对所形成的纳米颗粒的结构和组成以及所得的CNF形态具有重大影响。产生具有优选的（111）或（100）织构的镍膜，并鉴定和研究了有利于界面硅化反应的条件。膜和纳米颗粒的组成和结构分析均表明，沉积的Ni催化剂膜的性能会影响后续的纳米颗粒形成，并最终影响碳纳米纤维的催化生长。

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