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Flexible transfer of aligned carbon nanotube films for integration at lower temperature

机译：定向碳纳米管薄膜的柔性转移，可在较低温度下整合

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摘要

The high growth temperature of carbon nanotubes ( CNTs) hinders their direct assembly on temperature-sensitive substrates. We present a method to transfer an aligned CNT film at room temperature to overcome this problem. Using a 'liftoff' technique with hydrofluoric acid solution, we separate the aligned CNT film from the silicon substrate. The lifted-off CNT film is suspended in water, remaining intact and aligned due to the crowding effect. We then transfer the suspended film to various substrates that are sensitive to high temperature. To illustrate the quality of the transferred CNT film, we demonstrate that the thermal interface resistance of the transferred CNT film is comparable with that of as-grown CNT film. This transfer process can be extended to many microelectronics applications, such as field emission devices, integrated circuit interconnects and sensors, requiring processing temperatures not compatible with CNT growth.
机译：碳纳米管（CNT）的高生长温度阻碍了它们在温度敏感基材上的直接组装。我们提出了一种在室温下转移取向的CNT膜的方法来克服这个问题。使用氢氟酸溶液的“剥离”技术，我们将取向的CNT膜与硅基板分离。剥离的CNT薄膜悬浮在水中，由于拥挤效应而保持完整并对齐。然后，我们将悬浮膜转移到对高温敏感的各种基材上。为了说明转移的CNT膜的质量，我们证明了转移的CNT膜的热界面电阻与生长的CNT膜相当。该转移过程可以扩展到许多微电子应用，例如场发射器件，集成电路互连和传感器，需要与CNT生长不兼容的处理温度。

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