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Large-scale local probe oxidation of OTS monolayers

机译:OTS单层的大规模局部探针氧化

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A broad variety of functional structures with nanometer dimensions can be produced by combining the local probe oxidation of octadecyl trichlorosilane (OTS) self-assembled monolayers on silicon and suitable chemical modification and self-assembly methods. However, local probe-based patterning methods are inherently slow and, due to the small areas that are addressed, spectroscopic characterization is difficult. Here we report on the possibility of creating large-scale surface patterns by electro-oxidation using both an automated oxidation setup and conductive parallel cantilever arrays. This enables large-scale surface pattering while retaining the high resolution and freedom of (sequential) pattern formation, which would be lost if macroscopic patterned stamps were applied as electrodes.
机译:通过结合在硅上的十八烷基三氯硅烷(OTS)自组装单层的局部探针氧化以及合适的化学修饰和自组装方法,可以生产出具有纳米尺寸的多种功能结构。然而,基于局部探针的图案化方法本质上是缓慢的,并且由于要解决的小区域,光谱表征是困难的。在这里,我们报告了使用自动氧化装置和导电平行悬臂阵列通过电氧化产生大规模表面图案的可能性。这使得能够进行大规模的表面图案化,同时保留高分辨率和(顺序)图案形成的自由度,如果将宏观图案化的印模用作电极,则将丧失这些自由度。

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