Direct Patterning of Rotary Encoder Grating on the Metallic Shaft with YAG Laser Marker

Onda H.; Uchiyama N.

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Direct Patterning of Rotary Encoder Grating on the Metallic Shaft with YAG Laser Marker

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摘要

A new patterning method of an optical rotary encoder gratings is proposed and tested for higher precision and higher rotational speed more than 30000 min~(-1), which marks the grating patterns directly on the metallic shaft of an air spindle by using YAG laser marker. It is pointed that the second harmonic generated NNG laser wave is more effective for this application rather than the fundamental wave. The experimental patterning system applies a precise speed control system using a flywheel and the PIL (Phase Locked Loop) speed control system with the unique error compensation. The validity of this method is proved from a microscopic examination of the patterned gratings and the regeneration of the encoder signal with a standard optical detector.

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《精密工学会誌》 |2000年第8期|1256-1260|共5页
作者
Onda H.; Uchiyama N.;
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正文语种日语
中图分类机械制造工艺;仪器、仪表;
关键词
laser marker; patterning; YAG laser; second harmonic generator; rotary encoder; air spindle;

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Direct Patterning of Rotary Encoder Grating on the Metallic Shaft with YAG Laser Marker

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