Kinetic simulation of capacitively coupled plasmas driven by trapezoidal asymmetric voltage pulses

Paola Diomede; Demetre J. Economou

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Kinetic simulation of capacitively coupled plasmas driven by trapezoidal asymmetric voltage pulses

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摘要

A kinetic Particle-In-Cell simulation with Monte Carlo Collisions was performed of a geometrically symmetric capacitively coupled, parallel-plate discharge in argon, driven by trapezoidal asymmetric voltage pulses with a period of 200 ns. The discharge was electrically asymmetric, making the ion energy distributions at the two electrodes different from one another. The fraction of the period (α), during which the voltage was kept at a constant (top-flat) positive value, was a critical control parameter. For the parameter range investigated, as α increased, the mean ion energy on the grounded electrode increased and the ions became more directional, whereas the opposite was found for the ions striking the powered electrode. The absolute value of the DC self-bias voltage decreased as α increased. Plasma instabilities, promoted by local double layers and electric field reversals during the time of the positive voltage excursion, were characterized by electron plasma waves launched from the sheath edge.

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来源
《Journal of Applied Physics》 |2014年第23期|233302-1-233302-9|共9页
作者
Paola Diomede; Demetre J. Economou;
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作者单位

Plasma Processing Laboratory, Department of Chemical and Biomolecular Engineering, University of Houston, Houston, Texas 77204-4004, USA;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种英语
中图分类应用物理学;
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机译：Electric field reversals resulting from voltage waveform tailoring in Ar/O2 capacitively coupled plasmas sustained in asymmetric systems

Kinetic simulation of capacitively coupled plasmas driven by trapezoidal asymmetric voltage pulses

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