Frequency-modulation atomic force microscopy at high cantilever resonance frequencies using the heterodyne optical beam deflection method

Fukuma  T; Kimura  K; Kobayashi  KMatsushige  KYamada  H

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Frequency-modulation atomic force microscopy at high cantilever resonance frequencies using the heterodyne optical beam deflection method

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摘要

We have developed a frequency-modulation atomic force microscope (FM-AFM) with a wideband cantilever deflection sensor using the heterodyne optical beam deflection method. The method enhances the bandwidth of the deflection measurement up to the maximum frequency for the laser power modulation, which can be as high as gigahertz order. The phase and frequency of the cantilever vibration at 5.24 MHz are detected with a deflection noise density of 100 fm/ root Hz. FM-AFM imaging is performed on a Au(111) surface with a high-frequency cantilever. (c) 2005 American Institute of Physics.

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来源
《Review of Scientific Instruments》 |2005年第12期|26110-1-26110-3-0|共3页
作者
Fukuma T; Kimura K; Kobayashi KMatsushige KYamada H;
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作者单位

Kyoto Univ, Dept Elect Sci & Engn, Kyoto 6158510, Japan;

Kyoto Univ, Int Innovat Ctr, Kyoto 6068501, Japan;

Japan Sci & Technol Corp, JST, Core Res Evolut Sci & Technol, CREST, Kawaguchi, Saitama 3320012, Japan;

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正文语种英语
中图分类一般性问题;
关键词
ENERGY-DISSIPATION; RESOLUTION; SCALE; SENSITIVITY; TOPOGRAPHY; CONTRASTS; SURFACE; PROBES;

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Frequency-modulation atomic force microscopy at high cantilever resonance frequencies using the heterodyne optical beam deflection method

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