Analysis and Improvement of Motion Accuracy of Hydrostatic Feed Table (2nd Report)

Chun-Hong PARK; Eiji SHAMOTO; Toshimichi MORIWAKI

首页> 外文期刊>精密工学会誌 >Analysis and Improvement of Motion Accuracy of Hydrostatic Feed Table (2nd Report)

【24h】

Analysis and Improvement of Motion Accuracy of Hydrostatic Feed Table (2nd Report)

机译：

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

An analytical model to predict motion accuracy of hydrostatic feed tables and a corrective lapping algorithm to improve their accuracy, which were proposed in the previous paper; are verified experimentally in the present research. A hydrostatic feed table is developed, which has a single-sided guide in the vertical direction and a double-sided guide in the horizontal direction. Profiles of its guide rails are measured with a previously developed apparatus, which has a measuring accuracy of +- 0.03 #mu#m. The averaging effect of oil film in the multiple pad table is clarified analytically by introducing 'motion error transfer function', which relates the motion error of the table with the rail profiles at each special frequency. The motion errors of the table are simulated by the proposed analytical model in accordance with the measured profiles and the calculated motion error transfer function, and it is confirmed that the motion errors simulated in the vertical and horizontal directions are all in good agreement with the errors measured with a laser interferometer. Furthermore, the corrective lapping algorithm developed in the previous research is also verified experimentally by utilizing the developed feed table with a stroke of 145 nm, and straight motion accuracy of 0.07 #mu#m and 1.42 arcsec is achieved for the double-sided guide, and 0.13 #mu#m and 1.40 arcsec for the single-sided guide after the corrective lapping.

著录项

来源
《精密工学会誌》 |2001年第6期|903-909|共7页
作者
Chun-Hong PARK; Eiji SHAMOTO; Toshimichi MORIWAKI;
展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种日语
中图分类机械制造工艺;仪器、仪表;
关键词
motion accuracy; hydrostatic feed table; transfer function; corrective lapping;

相似文献

外文文献
中文文献
专利

1. Prediction of motion accuracy in five degrees of freedom for hydrostatic rotary table with any recess number [J] . Zhang Penghai, Chen Yaolong, Zha JunLei Zhimei Proceedings of the Institution of Mechanical Engineers, Part C. Journal of mechanical engineering science . 2021,第17期

机译：Prediction of motion accuracy in five degrees of freedom for hydrostatic rotary table with any recess number
2. Weather analysis and forescasting. Vol. I. Motion and motion systems. By Sverre Petterssen. New York (McGraw–Hill), 2nd Edition, 1956. Pp. xix, 428; 241 Figs., 20 Tables. $8.50 (64s.) [J] . quarterly journal of the royal meteorological society . 1956,第354期

机译：Weather analysis and forescasting. Vol. I. Motion and motion systems. By Sverre Petterssen. New York (McGraw–Hill), 2nd Edition, 1956. Pp. xix, 428; 241 Figs., 20 Tables. $8.50 (64s.)
3. Tokyo Institute of Technology Researchers Report Research in Robotics (Stochastic parameter identification based on dynamic/ static sensitivity analysis for feed-forward control of robot periodic motion) [J] . Robotics & Machine Learning Daily News . 2022,第28期

机译：Tokyo Institute of Technology Researchers Report Research in Robotics (Stochastic parameter identification based on dynamic/ static sensitivity analysis for feed-forward control of robot periodic motion)
4. Designing a Project Leader Recommender System using Twitter Feed Analysis [C] . Poonam Rani, Jyoti Shokeen International Conference on Machine Learning, Big Data, Cloud and Parallel Computing . 2019

机译：使用Twitter Feed Analysis设计项目负责人推荐系统
5. Improvement of the Quantification Accuracy and Throughput for Phosphoproteome Analysis by a Pseudo Triplex Stable Isotope Dimethyl Labeling Approach [O] . Song Chunxia, Wang Fangjun, Ye Mingliang, 2011

机译：Improvement of the Quantification accuracy and Throughput for phosphoproteome analysis by a pseudo Triplex stable Isotope Dimethyl Labeling approach

Analysis and Improvement of Motion Accuracy of Hydrostatic Feed Table (2nd Report)

摘要

著录项

相似文献

相关主题

期刊订阅