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Molecular Dynamics Analysis of Laser Shock Phenomena due to Gaussian Beam Irradiation

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Recently, ultrashort-pulse lasers with high peak power have been developed, and their application to the materials processing is expected for a tool of precision microfabrication. During surface generation process with laser ablation, a shock wave propagates inside the material and lattice defects such as dislocations are generated beneath the surface. Lattice defects influence the quality or accuracy of materials processing, therefore it is important for laser precision microfabrication to elucidate the generation mechanism of them. In this paper, laser shock phenomena of metal were analyzed using the modified molecular dynamics method, which has been developed by Ohmura and Fukumoto. Main results obtained are summarized as follows: (1) The shock wave induced by the Gaussian beam irradiation propagates radially from the surface to the interior. (2) A lot of dislocations are generated at the solid-liquid interface by the propagation of shock wave. (3) Some dislocations are moved instantaneously with the velocity of longitudinal wave when the shock wave passes, and their velocity is not larger than one of transverse velocity after the shock wave has passed.

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