Ternary C-H-halogen phase diagram for CVD diamond

Wan YZ.; Zhang ZM.; He XC.Shen HS.

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Ternary C-H-halogen phase diagram for CVD diamond

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Ternary phase diagram for CVD diamond has been calculated in the ternary system C-H-halogen at various temperature and pressure to identify the diamond growth region. There are diamond growth regions in these phase diagrams. it reveals that the possible mixture composition for diamond growth is confined in diamond growth region. Diamond growth region changes greatly with temperature in halogen addition systems. There is a similar trend of diamond growth region at high temperature in the systems of C-H-chlorine, C-H-brornine and C-H-iodine. The different feature is that diamond growth region exist in halogen-rich region in C-H-chlorine system, for which very little experimental data is reported. The comparison with experimental data suggests that the calculated phase diagrams can be predictable for optimizing growth conditions of CVD diamond. (C) 2000 Published by Elsevier Science S.A. All rights reserved. References: 33

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来源
《Materials Chemistry and Physics》 |2000年第1期|88-92|共5页
作者
Wan YZ.; Zhang ZM.; He XC.Shen HS.;
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作者单位

Shanghai Jiao Tong Univ, Microelect Tech Ctr, Shanghai 200030, Peoples R China, .;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种英语
中图分类工程材料学;工程基础科学;
关键词
Diamond; Halogen; Phase diagram; Chemical vapor deposition; Chemical-vapor-deposition; Microwave-plasma; Gas-phase; Cf4 addition; Growth; Temperature; Chlorine; Films; Reactants; Fluorine;

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1. Phase diagrams for CVD diamond deposition from halogen-containing gas phase [J] . Zhi-Jie Liu, David Wei Zhang, Jian-Yun ZhangYong-Zhong WanJi-Tao Wang Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films . 1999,第2期

机译：Phase diagrams for CVD diamond deposition from halogen-containing gas phase
2. Phase diagrams for CVD diamond deposition from halogen-containing gas phase [J] . Zhi-Jie Liu, David Wei Zhang, Jian-Yun ZhangYong-Zhong WanJi-Tao Wang Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films . 1999,第12期

机译：Phase diagrams for CVD diamond deposition from halogen-containing gas phase
3. Projective phase diagrams for CVD diamond growth from C-H and C-H-O systems [J] . Zhi-Jie Liu, David Wei Zhang, Peng-Fei WangShi-Jin DingJian-Yun ZhangJi-Tao WangKatharina Kohse-Hoinghaus Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films . 2000,第2期

机译：Projective phase diagrams for CVD diamond growth from C-H and C-H-O systems
4. Phase Diagrams of SOAM Coupled BEC [C] . Ali Farooq, Xu Jin, Li Jinbin Nanjing University of Aeronautics and Astronautics;Graduate Forum of CSAA;International Academic Conference for Graduates of NUAA . -1

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5. 應用於毫米波相位陣列系統之相移器設計 =Design of Phase Shifters for Millimeter Wave Phase Array System [D] . Hsiao, Hsuan. 2019

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8. CVD Grown Diamond: a new material for high power CO2-lasers [R] . M. Massart, P. Union, G. A. Scarsbrook 1996

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Ternary C-H-halogen phase diagram for CVD diamond

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