Synthesis of nanometer-sized SiC powders through chemical vapour deposition - I. Effect of reaction temperature

Zhu WZ.; Yan M.

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Synthesis of nanometer-sized SiC powders through chemical vapour deposition - I. Effect of reaction temperature

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Nanometer-sized SiC powders have been synthesized through chemical vapour deposition using self-designed setup. The features of the powders have been examined by X-ray diffraction, transmission electron microscopy, infrared ray absorption spectrum and chemical analysis, with emphasis intentionally put on the effect of reaction temperature. It is disclosed that SiC powders with narrow size distribution, spherical shapes high purity, excellent crystallinity and as fine as 9 nm being the smallest average size that can he synthesized. Both the particle size and grain size increase with increasing temperatures. The highest purity is obtained when the reaction occurs at 1300 degrees C. (C) 1998 Elsevier Science S.A. All rights reserved. References: 10

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《Materials Chemistry and Physics》 |1998年第3期|262-266|共5页
作者
Zhu WZ.; Yan M.;
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作者单位

Zhejiang Univ, Dept Mat Sci & Engn, Hangzhou 310027, Peoples R China, .;

bh.med.kyoto-u.ac.jp;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种英语
中图分类工程材料学;工程基础科学;
关键词
Nanometer-sized sic powders; Chemical vapour deposition; Reaction temperature; Laser; Particles;

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1. LOW TEMPERATURE ZIRCONIA THIN FILM SYNTHESIS BY A CHEMICAL VAPOUR DEPOSITION PROCESS INVOLVING ZRCL4 AND O-2-H-2-AR MICROWAVE POST-DISCHARGES - COMPARISON WITH A CONVENTIONAL CVD HYDROLYSIS PROCESS [J] . Gavillet J., Hertz D., Michel H.Belmonte T. Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films . 1997,第2期

机译：LOW TEMPERATURE ZIRCONIA THIN FILM SYNTHESIS BY A CHEMICAL VAPOUR DEPOSITION PROCESS INVOLVING ZRCL4 AND O-2-H-2-AR MICROWAVE POST-DISCHARGES - COMPARISON WITH A CONVENTIONAL CVD HYDROLYSIS PROCESS
2. Effect of temperature on the formation of surface layers in plasma-assisted chemical vapour deposition processes carried out in an atmosphere containing Ti(OiC3H7)4vapours [J] . J.R.Sobiecki, T.Wierzchon, B.Kułakowska-PawlakW.Żyrnicki Journal of Materials Science Letters . 2004,第2期

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3. Analysis and numerical modelling of silicon nitride deposition in a plasma-enhanced chemical vapour deposition reactor. I. Bidimensional modelling [J] . A Dollet, J P Couderc, B Despax Plasma Sources Science & Technology . 1995,第1期

机译：Analysis and numerical modelling of silicon nitride deposition in a plasma-enhanced chemical vapour deposition reactor. I. Bidimensional modelling
4. Synthesis of ordered mesoporous carbons composed of nanotubes via catalytic chemical vapor deposition [O] . Zhang WH, Liang CH, Sun HJ, 2002

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Synthesis of nanometer-sized SiC powders through chemical vapour deposition - I. Effect of reaction temperature

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