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>ARL-TR-8488 - Lead Zirconate Titanate (PZT) Microelectromechanical System (MEMS) HF/VHF Resonators and Filters for 50-ohm Termination | U.S. Army Research Laboratory
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ARL-TR-8488 - Lead Zirconate Titanate (PZT) Microelectromechanical System (MEMS) HF/VHF Resonators and Filters for 50-ohm Termination | U.S. Army Research Laboratory
This report covers lead zirconate titanate (PZT) resonators and filters in the high-frequency and very-high-frequency bands. Design of resonators for 50-ohm termination are described, resulting in resonators with insertion loss below 1 dB that are orders of magnitude smaller than similar commercial parts at this frequency. Design of monolithically integrated flexure and extension resonators with varied coupling and quality factors are presented with cross-wafer uniformity data for extensional devices.
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