Dry Etching for Coherent Refractive Microlens Arrays

机译：用于相干折射微透镜阵列的干蚀刻

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Coherent arrays of refractive micro-optics are fabricated in the surface ofsilicon using a combination of lithographic and reactive-ion etching (RIE) techniques. The aspheric profile can be approximated in a stepwise manner by iterative steps of photolithography and RIE (binary optics technology), by direct etching of a preshaped polymer microlens etch mask into the substrate, or by analog etching of a lens profile directly into the substrate through a pinhole mask. jg.

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作者
Stern, M. B.; Jay, T. R.;
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年度 1994
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总页数 6
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Coherence; Arrays; Etching; Silicon; Lenses; Photolithography; Ions; Reprints; Optics; Optical properties; Refractive index; Reactivities; Substrates; Ion beams; Surfaces; Profiles; Engineering; Dry materials; Analog systems; Masks; Drying; Curved profile;

机译：相干;阵列;蚀刻;硅;透镜;光刻;离子;重印;光学;光学性质;折射率;反应性;基板;离子束;表面;轮廓;工程;干燥材料;模拟系统;掩模;干燥;弯曲轮廓;

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1. Quasi-periodic concave microlens array for liquid refractive index sensing fabricated by femtosecond laser assisted with chemical etching [J] . F. Zhang, C. Wang, K. Yin, Scientific reports. . 2018,第1期

机译：飞秒激光辅助化学刻蚀制造的用于液体折射率传感的准周期凹微透镜阵列
2. Study on new method and mechanism of microcutting-etching of microlens array on 6H-SiC mold by combining single point diamond turning with ion beam etching [J] . Zhou Tianfeng, Xu Ruzhen, Ruan Benshuai, Journal of Materials Processing Technology . 2020,第期

机译：用离子束蚀刻结合单点金刚石蚀刻微型蚀刻微塑料蚀刻微塑料蚀刻的新方法及机理
3. Coherent Array of White-Light Continuum Generated by Microlens Array [J] . Wataru Watanabe, Yoshiyasu Masuda, Hidenobu Arimoto, Optical review . 1999,第3期

机译：由微透镜阵列产生的白光连续体的相干阵列
4. Fabrication of Refractive Microlens Array by Etching Ammonium Dichromate Gelatin (ADG) with Enzyme [C] . Jun Yao, Fuhua Gao, Feng Gao, Conference on Micromachining Technology for Micro-Optics 20 September 2000 Santa Clara, USA . 2000

机译：酶刻蚀重铬酸铵明胶（ADG）制备折射微透镜阵列
5. Modeling of the Micro-Indentation Process to Create Microlens Array Features on a Mold [D] . Gundyal, Sumit Anand. 2019

机译：微压缩过程的建模，以在模具上创建微透镜阵列特征
6. Quasi-periodic concave microlens array for liquid refractive index sensing fabricated by femtosecond laser assisted with chemical etching [O] . F. Zhang, C. Wang, K. Yin, -1

机译：飞秒激光辅助化学刻蚀制造的用于液体折射率传感的准周期凹微透镜阵列
7. Quasi-periodic concave microlens array for liquid refractive index sensing fabricated by femtosecond laser assisted with chemical etching [O] . F. Zhang, C. Wang, K. Yin, 2018

机译：用于液体折射率检测的准周期凹微透镜阵列，由Femtosecond激光辅助化学蚀刻
8. Effect of Refractive Microlens Array Fabrication Parameters on Optical Quality [R] . Jay, T. R., Stern, M. B., Knowlden, R. E. 1992

机译：折射微透镜阵列制作参数对光学质量的影响

Dry Etching for Coherent Refractive Microlens Arrays

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