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Characterization of the Mechanisms Producing Bending Moments in Polysilicon Micro-Cantilever Beams by Interferometric Deflection Measurements

机译：用干涉偏转测量法表征多晶硅微悬臂梁产生弯矩的机理

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Polysilicon micro cantilever beams and doubly supported beams are fabricated and conditioned with phosphorus doping and high temperature anneal cycles to assess the effects of process history and geometry on polysilicon microstructure rigidity. Using a Linnik interferometer, deflection trends for series of beams are measured and compared for several process conditions. Two bending moments can induce beam deflection: the first due to the beam boundary support, and the second, due to stress nonuniformity through the beam thickness. A comparison of polysilicon microstructure deflection behavior for doping and annealing conditions is presented and discussed. Reprints. (mjm)

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作者
Lober, T. A.; Huang, J.; Schmidt, M. A.; Senturia, S. D.;
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年度 1988
页码 p.1-6
总页数 6
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Bending moments; Cantilever beams; Doping; Interferometers; Interferometry; Phosphorus; Polysilicons; Annealing; Boundaries; Cycles; Deflection; High temperature; Measurement; Microstructure; Patterns; Reprints; Rigidity; Thickness;

机译：弯曲力矩;悬臂梁;掺杂;干涉仪;干涉测量;磷;多晶硅;退火;边界;周期;偏转;高温;测量;微观结构;图案;重印;刚性;厚度;

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4. Characterization of the mechanisms producing bending moments in polysilicon micro-cantilever beams by interferometric deflection measurements [C] . Lober, T.A., Huang, . 1988

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5. A COMPARISON OF THE BENDING MOMENTS, SHEARS AND DEFLECTIONS FOR SUSPENSION BRIDGES WITH CONTINUOUS AND TWO-HINGED STIFFENING TRUSSES. [D] . NALLAKRISHNAN, GOVINDAPPA. 1958

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Characterization of the Mechanisms Producing Bending Moments in Polysilicon Micro-Cantilever Beams by Interferometric Deflection Measurements

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