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Production of Ultrasmall and Superfine Holographic Diffraction Gratings Using Synchrotron Radiation and Lithographic Techniques

机译：利用同步辐射和光刻技术生产超小型和超细全息衍射光栅

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The research effort was directed toward the production of superfine X-ray gratings by holographic means, i.e. generating an interference pattern by X-rays emitted in the form of synchrotron radiation from a high energy electron storage ring, recording the pattern on a resist, such as PMMA, and subsequently transferring it onto metal.

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作者
Csonka, P. L.;
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年度 1987
页码 p.1-21
总页数 21
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Gratings(Spectra); Photolithography; Holography; x Ray diffraction; High resolution; Intervals; Short range(Distance); Fabrication; Polymethyl methacrylate;

机译：光栅（光谱）;光刻;全息; x射线衍射;高分辨率;间隔;短距离（距离）;制造;聚甲基丙烯酸甲酯;

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专利

1. Rigorous calculations and synchrotron radiation measurements of diffraction efficiencies for tender X-ray lamellar gratings: conical versus classical diffraction [J] . Leonid Goray, Werner Jark, Diane Eichert Journal of synchrotron radiation . 2018,第6期

机译：柔性X射线层状光栅衍射效率的严格计算和同步辐射测量：锥形与古典衍射
2. Features of the diffraction of supershort pulsed radiation in a system of superimposed transmitting volume phase holographic gratings [J] . Ionina N.V. Journal of optical technology . 2012,第10期

机译：传输体积相全息光栅叠加系统中超短脉冲辐射的衍射特征
3. Features of the diffraction of pulsed femtosecond radiation at a transmissive holographic volume grating [J] . N. V. lonina Journal of optical technology . 2009,第6期

机译：飞秒全息图在透射全息体积光栅上的衍射特征
4. Test of holographic SiC gratings for high-power synchrotron radiation [C] . Eiji Ishiguro, Hideki Maezawa, Makoto Sakurai, Conference on high heat flux engineering . 1993

机译：高功率同步辐射的全息SiC光栅测试
5. Laser inscription of holographic diffraction gratings in thin films of azo polymers. [D] . Barrett, Chritsopher John. 1998

机译：偶氮聚合物薄膜中的全息衍射光栅的激光刻印。
6. Synchrotron Radiation X-ray Diffraction Techniques Applied to Insect Flight Muscle [O] . Hiroyuki Iwamoto 2018

机译：同步辐射X射线衍射技术在昆虫飞行肌肉中的应用
7. Holographic Diffraction Imaging at the Nano-scale by Coherent Hard X-ray Synchrotron Radiation [O] . Saliba, Mirna 2016

机译：相干硬X射线同步加速器辐射在纳米尺度上的全息衍射成像。

Production of Ultrasmall and Superfine Holographic Diffraction Gratings Using Synchrotron Radiation and Lithographic Techniques

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