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Low-Loss Slow-Wave Propagation along a Microstructure Transmission Line on a Silicon Surface

机译：硅表面微结构传输线的低损耗慢波传播

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摘要

We report observations of relatively low-loss propagation in the frequency range of 1.0 to 12.4 GHz using a micrometer-size coplanar MIS transmission line fabricated on a heavily doped N(+) surface. This low-loss mode of propagation which suggests that such lines may be useful as transmission media for distributed components in silicon monolithic microwave integrated circuits.

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作者
Hietala, V. M.; Kwon, Y. R.; Champlin, K. S.;
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年度 1986
页码 p.1-3
总页数 3
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Transmission lines; Slow wave circuits; Microwave equipment; Silicon; Integrated circuits; Low loss; Substrates; Gallium arsenides; Wave propagation; Reprints;

机译：传输线;慢波电路;微波设备;硅;集成电路;低损耗;基板;砷化镓;波传播;重印;

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1. Low-Loss Spoof Surface Plasmon Slow-Wave Transmission Lines With Compact Transition and High Isolation [J] . Amin Kianinejad, Zhi Ning Chen, Cheng-Wei Qiu IEEE Transactions on Microwave Theory and Techniques . 2016,第10期

机译：具有紧凑过渡和高隔离度的低损耗欺骗表面等离激元慢波传输线
2. DESIGN GUIDELINES FOR LOW-LOSS SLOW-WAVE COPLANAR TRANSMISSION LINES IN RF-CMOS TECHNOLOGY [J] . D. Kaddour, H. Issa, M. Abdelaziz, Microwave and optical technology letters . 2008,第12期

机译：RF-CMOS技术中低损耗慢波共面传输线的设计指南
3. Hybrid-mode analysis of homogeneously and inhomogeneously doped low-loss slow-wave coplanar transmission lines [J] . Wu K., Vahldieck R. IEEE Transactions on Microwave Theory and Techniques . 1991,第8期

机译：均匀和不均匀掺杂的低损耗慢波共面传输线的混合模式分析
4. Field theory analysis of slow-wave propagation on silicon based coplanar MIS transmission lines [C] . Shuoqi Chen, Vahldieck, R. . 1996

机译：硅基共面MIS传输线上慢波传播的场理论分析
5. The chemistry and surface microstructure of silicon-based substrates and their effect on the evolution of the microstructures of III-nitride films grown via metalorganic vapor phase epitaxy. [D] . Reitmeier, Zachary J. 2005

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6. High-resolution electrical mapping of porcine gastric slow-wave propagation from the mucosal surface [O] . Timothy R. Angeli, Peng Du, Niranchan Paskaranandavadivel, -1

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7. Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching [O] . Kapil Debnath, Ali Z Khokhar, Stuart A Boden, 2016

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Low-Loss Slow-Wave Propagation along a Microstructure Transmission Line on a Silicon Surface

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