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Proportional Piezoelectric Electropneumatic Servovalve Design

机译：比例压电电动气动伺服阀设计

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This report deals with the development of a new proportional electropneumatic servovalve. The first stage of the valve consists of a piezoelectric bender element of bimorph construction centered between two nozzles. The bimorph acts as a flapper and is deformed by an electrical input signal. This deformation causes a pressure difference to be generated downstream of the nozzles. This pressure difference is then amplified to some usable level using laminar proportional amplifiers. An equivalent mathematical model for the behavior of the valve system is developed and verified. The model is then used to select a bimorph and a laminar proportional amplifier gain block. After the system parameters have been selected using the model, a working prototype is then constructed and tested. The validity of the design equations is shown by the correlation with experimental results, and an improved design is suggested. (Author)

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