Development and Verification of Sputtered Thin-Film Nickel-Titanium (NiTi) Shape Memory Alloy (SMA).

著录项

• 作者

  Knick, C. R.; Morris, C. J.;

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• 作者单位

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• 年度 2015
• 页码 1-16
• 总页数 16
• 原文格式 PDF
• 正文语种 eng
• 中图分类 工业技术;
• 关键词

  Phase transformations; Shape memory alloys; Thin films; Actuation; Differential scanning calorimetry; Microelectromechanical systems; Nickel; Sputtering; Stresses; Temperature; Titanium; Verification; Mems(microelectromechanical systems); Sma(shape memory alloys); Thermal actuation; Niti(nickel titanium); Dsc(differential scanning calorimetry);

  机译：相变;形状记忆合金;薄膜;驱动;差示扫描量热法;微机电系统;镍;溅射;应力;温度;钛;验证; mems（微机电系统）; sma（形状记忆合金）;热驱动; Niti（镍钛）; Dsc（差示扫描量热法）;