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Micromachined Magnetic-Field Sensor Based on an Electron Tunneling Displacement Transducer; Journal article

机译：基于电子隧道位移传感器的微机械磁场传感器;杂志文章

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We describe a micromachined magnetic-field sensor that is based on an electron tunneling transducer. This tunnel sensor is small, very sensitive, operates at ambient temperature and requires very little power. The measured resolution of the sensor is 0.3 nT/square root of Hz at 1 Hz. The limiting resolution, calculated based on fundamental noise sources, is 0.002 nT/square root of Hz at 1 Hz. The dominant source of the observed noise in the present device is low frequency air pressure fluctuations.

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DiLella, D.; Whitman, L. J.; Colton, R. J.; Kenny, T. W.; Kaiser, W. J.;
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年度 2000
页码 p.1-14
总页数 14
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Magnetic fields; Tunneling(Electronics); Micromachining; Microelectromechanical systems; Reprints; Displacement; Detectors;

机译：磁场;隧道（电子）;微加工;微机电系统;重印;位移;探测器;

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专利

1. A micromachined magnetic-field sensor based on an electron tunneling displacement transducer [J] . DiLella D., Colton RJ., Kenny TW., Sensors and Actuators, A. Physical . 2000,第1a2期

机译：基于电子隧穿位移传感器的微机械磁场传感器
2. A micromachined magnetic-field sensor based on an electron tunneling displacement transducer [J] . D. DiLella, L.J. Whitman, R.J. Colton Sensors and Actuators, A. Physical . 2000,第1a2期

机译：基于电子隧穿位移传感器的微机械磁场传感器
3. A Micromachined Wide-Bandwidth Magnetic Field Sensor Based on All-PMMA Electron Tunneling Transducer [J] . Jing Wang, Wei Xue, Naidu V. Seetala, IEEE sensors journal . 2006,第1期

机译：基于全聚甲基丙烯酸甲酯电子隧穿传感器的微加工宽带磁场传感器
4. A high-sensitivity micromachined accelerometer based on electron tunneling transducers [C] . C. H. Liu, J. K. Reynolds, A. Partridge, ASME International Mechanical Engineering Congress and Exposition . 1997

机译：基于电子隧道换能器的高灵敏度微机械加速度计
5. Micromachined broadband acoustic transducers with integrated optical displacement detection [D] . Hall, Neal A. 2004

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6. Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review [O] . Dovydas Barauskas, Mindaugas Dzikaras, Dovydas Bieliauskas, 2020

机译：基于电容式微机械超声换能器结构的选择性超声波重力传感器—综述
7. Micromachined electron tunneling infrared sensors [O] . Kaiser W. J., Podosek J. A., Kenny T. W., 1993

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Micromachined Magnetic-Field Sensor Based on an Electron Tunneling Displacement Transducer; Journal article

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