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Elastic, plastic, and time dependent properties of thin films as determined by ultra low load indentation.

机译:通过超低负荷压痕确定的薄膜的弹性,塑性和时间依赖性。

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摘要

Using a highly spatially resolved mechanical properties microprobe, the elastic, plastic and time dependent mechanical properties of sapphire and a 1.9 (mu)m amorphous alumina film on a sapphire substrate have been studied. Young's modulus, hardness, and ...

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