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Sol-gel coating on acoustic wave devices: Thin film characterization and chemical sensor development.

机译：声波器件上的溶胶 - 凝胶涂层：薄膜表征和化学传感器开发。

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We have investigated the use of porous oxide coatings, formed using sol-gel chemistry routes, as the discriminating elements of acoustic wave (AW) chemical sensors. These coatings provide several unique advantages: durability, high adsorption capacity based on large surface areas, and chemical selectivity based on both molecular size and chemical interactions. The porosity of these coatings is determined by performing nitrogen adsorption isotherms using the AW device response to mass changes to monitor the uptake of nitrogen at 77 K. These studies demonstrate how sol-gel chemistry and film-forming technique can be used to tailor the microstructure of thin coatings. The chemical sensitivity and selectivity obtained with this class of coatings will be demonstrated using several examples: hydrous titanate ion exchange coatings, zeolite/silicate microcomposite coatings, and surface-modified silicate films. 18 refs., 4 figs., 2 tabs.

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Frye, G. G.; Brinker, C. J.; Ricco, A. J.; martin, S. J.; Hilliard, J.;
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年度 1990
页码 1-15
总页数 15
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Coatings; Probes; Acoustic Measurements; Ion Exchange Materials; Measuring Instruments; Microstructure; Nitrogen; Oxides; Porosity; Silanes; Silicates; Sol-Gel Process; Surface Coating; Zeolites; Meetings; Ceramics; EDB/360202; EDB/360201;

机译：涂料;探针;声学测量;离子交换材料;测量仪器;微结构;氮;氧化物;孔隙率;硅烷;硅酸盐;溶胶 - 凝胶工艺;表面涂层;沸石;会议;陶瓷; EDB / 360202; EDB / 360201;

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1. Chemical etching of Tungsten thin films for high-temperature surface acoustic wave-based sensor devices [J] . Spindler M., Herold S., Acker J., Thin Solid Films . 2016,第AUGa1期

机译：用于高温声表面波传感器设备的钨薄膜的化学蚀刻
2. Spatial control of organic nanocrystal nucleation in sol-gel thin films for 3-D optical data storage devices or chemical multi-sensors [J] . Botzung-Appert E, Zaccaro J, Gourgon C, Journal of Crystal Growth . 2005,第3a4期

机译：用于3-D光学数据存储设备或化学多传感器的溶胶-凝胶薄膜中有机纳米晶体成核的空间控制
3. In_2O_3 Thin Films Obtained Through a Chemical Complexation Based Sol-Gel Process and Their Application as Gas Sensor Devices [J] . M.Epifani, S.Capone, R.Rella, Journal of Sol-Gel Science and Technology . 2003,第1a2a3期

机译：通过化学络合的Sol-Gel工艺获得的In_2O_3薄膜及其在气体传感器中的应用
4. Characterization of doped BST thin films deposited by sol-gel for tunable microwave devices [C] . Khalfallaoui A., Velu G., Burgnies L., Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum . 2009

机译：溶胶-凝胶沉积可调谐微波器件的掺杂BST薄膜的特性
5. Silica sol-gel thin film coatings for integrated photonic devices. [D] . Rose, Brian Andrew. 2012

机译：用于集成光子器件的二氧化硅溶胶-凝胶薄膜涂料。
6. Uniform Thin Films of CdSe and CdSe(ZnS) Core(shell) Quantum Dots by Sol-Gel Assembly: Enabling Photoelectrochemical Characterization and Electronic Applications [O] . Lasantha Korala, Zhijie Wang, Yi Liu, -1

机译：CDSE和CDSE（ZNS）芯（壳）芯片的均匀薄膜通过溶胶 - 凝胶组件：使光电化学特征和电子应用
7. Characterizations of Cuprous Oxide Thin Films Prepared by Sol-Gel Spin Coating Technique with Different Additives for the Photoelectrochemical Solar Cell [O] . D. S. C. Halin, I. A. Talib, A. R. Daud, 2014

机译：用溶胶 - 凝胶旋涂技术用不同添加剂对光电化学太阳能电池制备的氧化亚铜薄膜的特征

Sol-gel coating on acoustic wave devices: Thin film characterization and chemical sensor development.

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