首页> 美国政府科技报告 >Plasma diagnostic studies of the influence of process variables upon the atomic and molecular species ejected from (1-x)Li4SiO4:(x)Li3PO4 targets during rf-magnetron sputtering.
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Plasma diagnostic studies of the influence of process variables upon the atomic and molecular species ejected from (1-x)Li4SiO4:(x)Li3PO4 targets during rf-magnetron sputtering.

机译:等离子体诊断研究过程变量对射频磁控溅射过程中从(1-x)Li4siO4:(x)Li3pO4靶射出的原子和分子种类的影响。

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The deposition of thin-film electrolytes is a critical step in the development of lithium microbatteries with the potential for circuit integration. We have performed a preliminary study of the rf-magnetron sputtering of (1-x)Li(sub 4)SiO(sub 4):xLi(sub 3)PO(sub 4) targets used to deposit amorphous thin-film electrolytes formed of the three-component system Li(sub 2)O--SiO(sub 2)--P(sub 2)O(sub 5). Mass and optical emission spectroscopies have been used to investigate the effects of target composition and the deposition conditions upon the atomic and molecular species ejected from the targets. The data provide important information for understanding the mechanism of film formation and for monitoring the Li atomic flux onto the substrates during film growth. 5 refs., 7 figs., 1 tab.

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