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Photoacoustic Detection Methods for Characterizing Laser Irradiation and Recrystallization of Semiconductors

机译：用于表征半导体激光照射和再结晶的光声检测方法

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The use of photoacoustic detection is discussed as a technique for monitoring laser heating and for characterizing implantation of recrystallization of semiconductors via optical absorption. Preliminary results are reported for laser heating of Ge. A method is proposed for signal processing to enable measurement of optical absorption coefficient changes due to implantation and recrystallization without a background signal from the unimplanted region of the semiconductor. (ERA citation 05:016133)

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作者
McClelland, J. F.; Kniseley, R. N.;
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年度 1979
页码 p.1-7
总页数 7
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Germanium; Semiconductor materials; Annealing; Damage; Gallium arsenides; Ion implantation; Laser-radiation heating; Monitoring; Photoacoustic effect; Recrystallization; Silicon; Surfaces; Thermal conductivity;

机译：锗;半导体材料;退火;损伤;砷化镓;离子注入;激光辐射加热;监测;光声效应;再结晶;硅;表面;导热系数;

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1. Detection of ammonia by photoacoustic spectroscopy with semiconductor lasers [J] . Schmohl A., Miklos A., Hess P. Applied optics . 2002,第9期

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2. Photoacoustic detection of microcracks of thin film head alumina using Nd:YAG laser irradiation [J] . Chekanov A., Hong M.H. IEEE Transactions on Magnetics . 1997,第5期

机译：Nd：YAG激光辐照光声检测薄膜头氧化铝的微裂纹
3. Evidence of the semiconductor-metal transition in V2O5 thin films by the pulsed laser photoacoustic method [J] . Perez-Pacheco A., Acosta-Najarro D.R., Castaneda-Guzman R., Journal of Applied Physics . 2013,第18期

机译：脉冲激光光声法在V2O5薄膜中半导体-金属过渡的证据
4. Automated heterodyne method to characterize semiconductor based akinetic swept laser sources [C] . Carlos Reyes, Tomasz Piwonski, Brian Corbett, Conference on Optical Coherence Imaging Techniques and Imaging in Scattering Media . 2019

机译：自动外差法表征基于半导体的动态扫描激光源
5. The Experimental Study of Characterized Noble Gas Puffs Irradiated by Ultra-Short Laser Pulses Compared with X-Pinches as an X-Ray Source [D] . Schultz, Kimberly Ann. 2017

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6. Photoacoustic Techniques for Trace Gas Sensing Based on Semiconductor Laser Sources [O] . Angela Elia, Pietro Mario Lugarà, Cinzia Di Franco, 2009

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7. DETEKSI GAS C2H4 PERNAFASAN SEBAGAI BIO-MARKER PROSES LIPID PEROKSIDASI DENGAN METODE SPEKTROSKOPI FOTOAKUSTIK LASER (DETECTION OF C2H4 GAS OF BREATH AS A BIOMARKER OF PROXIDATION LIPID PROSES VIA LASER-BASED PHOTOACOUSTIC SPECTROSCOPY METHOD) [O] . Mitrayana -, M.A.J. Wasono, W. Rochmah - 2009

机译：气体检测C2H4为WITH脂质过氧化LasER光声光谱（C2H4 BREaTH as LasER-BasED pROCEss VIa mETHOD光声光谱的生物标志pROXIDaTION脂过气体检测）的生物标志物呼吸过程
8. Laser and Electron Beam Processing of Semiconductors: CW Beam-Recrystallized Polysilicon as a Device-Worthy Material [R] . Gibbons, J. F. 1980

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Photoacoustic Detection Methods for Characterizing Laser Irradiation and Recrystallization of Semiconductors

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