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Pressure Waves Induced by Megasonic Agitation in a LIGA Development Tank

机译：LIGa开发槽中超声波搅拌引起的压力波

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摘要

Megasonic agitation is used to improve the uniformity of the LIGA development process. To investigate the acoustic wave fields induced by megasonic agitation, the authors compute wave fields for a development tank containing a submerged wafer and for a typical trench-like feature on the wafer face. The separate treatment of these two problems is advantageous, because the length scales of the tank and the feature differ by three to four orders of magnitude.

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作者
Ting, A.;
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年度 2002
页码 1-41
总页数 41
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Electron beam lithography ; Ultrasonic waves ; Photoresistors ; Acoustic waves ; Greens functions ; Wafers ; Etching ; Photomasks ; Spectral methods ; Tanks(Containers) ; Semiconductor devices;

机译：电子束光刻;超声波;光敏电阻;声波;绿色功能;晶圆;蚀刻;光掩模;光谱方法;坦克（容器）;半导体器件;

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1. Development of a sonovoltammetric cell for mass transport investigations in the LIGA-process under megasonic agitation [J] . Maria Lisinenkova, Klaus Bade, Lothar Hahn, Electrochimica Acta . 2007,第2期

机译：超声伏安法在LIGA工艺中进行传质研究的声伏安电池的研制
2. Wave-induced sloshing pressure in a liquid tank under irregular waves [J] . T Nasar, S A Sannasiraj, V Sundar Proceedings of the Institution of Mechanical Engineers, Part M: Journal of Engineering for the Maritime Environment . 2009,第2期

机译：不规则波作用下水箱内波浪引起的晃荡压力
3. Wave-induced sloshing pressure in a liquid tank under irregular waves [J] . T. Nasar, S. A. Sannasiraj, V. Sundar Proceedings of the Institution of Mechanical Engineers, Part M. Journal of Engineering for the Maritime Environment . 2009,第2期

机译：在不规则波作用下水箱中波浪引起的晃荡压力
4. Development of experimentally derived engineering models for the simulation of thermal stratification and slosh-induced pressure drop in cryogenic propellant tanks [C] . A. van Foreest IAC;International Astronautical Congress . 2011

机译：开发实验得出的工程模型，用于模拟低温推进剂罐中的热分层和晃荡引起的压降
5. Effect of irregular wave-induced pore pressure on seabed scour development around a verticle slender pile. [D] . Bollinger, Kevyn A. 2011

机译：波浪引起的不规则孔隙压力对垂直圆柱桩周围海底冲刷发育的影响。
6. Realization of an ultrathin acoustic lens for subwavelength focusing in the megasonic range [O] . Jaeyub Hyun, Yong Tae Kim, Il Doh, -1

机译：实现超音波透镜用于在超音速范围内进行亚波长聚焦
7. Pressure Waves Induced by Megasonic Agitation in a LIGA Development Tank [O] . Ting, Aili 2002

机译：LIGa开发槽中超声波搅拌引起的压力波
8. Pressure Waves Induced by Megasonic Agitation in a LIGA Development Tank [R] . Ting, A. 2002

机译：LIGa开发槽中超声波搅拌引起的压力波

Pressure Waves Induced by Megasonic Agitation in a LIGA Development Tank

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