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Fabrication of Efficient, Large Aperture Transmission Diffraction Gratings by Ion-Beam Etching

机译：离子束刻蚀制备高效大孔径透射衍射光栅

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We have designed and produced a high-efficiency transmission gratings fabricated in bulk fused silica for in high-power laser systems. These gratings were designed to diffractively compress 1050 nm - 1070 nm light. We have obtained diffracted efficiencies greater than 95% for m = -1 order in a near-Littrow configuration for a 2 diameter substrate. In addition, we have produce a 65 cm diameter bulk fused silica transmission grating that exhibits diffracted efficiency in places greater than 82% for m= -1 order. While we have made significant advances towards developing the ability to produce master gratings at this size, there are still several outstanding technology issues to be addressed.

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Nguyen, H. T.; Bryan, S. R.; Britten, J. A.; Perry, M. D.;
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年度 2000
页码 1-18
总页数 18
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Diffraction gratings ; Ion beam etching ; Pulsed power ; Inertial confinement ; Fused silica ; LLNL;

机译：衍射光栅;离子束蚀刻;脉冲功率;惯性约束;熔融石英; LLNL;

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专利

1. Fabrication of extreme-ultraviolet blazed gratings by use of direct argon-oxygen ion-beam etching through a rectangular photoresist mask [J] . Hui Lin, Lifeng Li Applied optics . 2008,第33期

机译：通过直接的氩氧离子束刻蚀通过矩形光刻胶掩模制造极紫外火焰光栅
2. Fabrication of extreme-ultraviolet blazed gratings by use of direct argon-oxygen ion-beam etching through a rectangular photoresist mask [J] . Hui Lin, Lifeng Li Applied optics . 2008,第33期

机译：通过直接的氩氧离子束刻蚀通过矩形光刻胶掩模制造极紫外火焰光栅
3. Aperture Apodization on Regular Gratings with Variable Transmission in the Zero Diffraction Order [J] . A. G. Poleshchuk, A. G. Sedukhin, N. Yu. Nikanorov Optoelectronics, Instrumentation and Data Processing . 2013,第6期

机译：零衍射级可变透射率的规则光栅上的孔径切趾
4. Fabrication of high-efficiency ultraviolet blazed gratings by use of direct Ar_2-CHF_3 ion-beam etching through a rectangular photoresist mask [C] . TAN Xin International symposium on photoelectronic detection and imaging;ISPDI 2011 . 2012

机译：通过矩形光致抗蚀剂掩模通过直接Ar_2-CHF_3离子束刻蚀制造高效紫外火焰光栅
5. Application of diffraction grating theory to analysis and fabrication of waveguide gratings. [D] . Li, Lifeng. 1988

机译：衍射光栅理论在波导光栅分析与制造中的应用。
6. Quasi suppression of higher-order diffractions with inclined rectangular apertures gratings [O] . Yuwei Liu, Xiaoli Zhu, Yulin Gao, -1

机译：倾斜矩形孔径光栅对高次衍射的拟抑制
7. Fabrication of Efficient, Large Aperture Transmission Diffraction Gratings by Ion-Beam Etching [O] . H T Nguyen, S R Bryan, J A Britten, 2000

机译：通过离子束蚀刻制造高效，大的孔径传动衍射光栅
8. Fabrication of Efficient, Large Aperture Transmission Diffraction Gratings by Ion-Beam Etching [R] . Nguyen, H. T., Bryan, S. R., Britten, J. A., 2000

机译：离子束刻蚀制备高效大孔径透射衍射光栅

Fabrication of Efficient, Large Aperture Transmission Diffraction Gratings by Ion-Beam Etching

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