首页> 美国政府科技报告 >Milestone Report for High NA Optics Development International Sematech Project L1TH 112 Milestone4a: Specification Package for the Polished Mirror Substrate M1

【24h】

Milestone Report for High NA Optics Development International Sematech Project L1TH 112 Milestone4a: Specification Package for the Polished Mirror Substrate M1

机译：高Na光学开发的里程碑报告国际sematech项目L1TH 112 milestone4a：抛光镜面基板的规格包m1

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

The key task in initiating the fabrication of mirror substrates for the new High NA Camera is in preparing the specification package that details the substrate geometry and the specifications for the optical surface. This specification package has been completed for substrate M1,and the vendor has begun optical fabrication. In addition, mounting hardware has been designed and fabricated, and substrates have been bonded to the kinematic mounts. The design of the secondary substrate, M2, is underway, but will depend upon details of the PO Box actuation system and space constraints. Sufficient details of the M2 design to enable the vendor to procure material will be determined during October,while the final details of the mounting surface will be completed prior to the end of Q4 1999. http://www.llnl. gov/tid/lof/documents/ pdf/236993.pdf

著录项

作者
Taylor, J. S.; Hale, L.;
展开▼
作者单位

展开▼
年度 1999
页码 1-8
总页数 8
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Optics ; Minors ; Substrates ; Metrology ; Specifications ; Optical properties ; Deformation ; Camera ; Design ; Lithography;

机译：光学;未成年人;基板;计量学;规格;光学特性;变形;相机;设计;光刻;

相似文献

外文文献
专利

1. "PAL-LIFE Project: International Advisory Working Group on Diffusion and Development of Palliative Care in the World": First Meeting Report [J] . Comoretto Nunziata Journal of palliative medicine . 2017,第9期

机译：“Pal-Life项目：世界上姑息治疗的国际咨询工作组”：第一次会议报告
2. A PARADIGM SHIFT IN THE DEVELOPMENT OF CHEMICAL MECHANICAL POLISHING (CMP): COST-EFFECTIVE CMP PLANARIZATION IN NEXT GENERATION SUBSTRATE/PACKAGE DESIGN AND MANUFACTURING [C] . Stefanie Lotz, Robert Baresel, Dipto Thakurta, American Society of Mechanical Engineers(ASME)/Pacific RIM Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005 pt.B; 20050717-22; San Francisco,CA(US) . 2005

机译：化学机械抛光（CMP）发展中的范式转移：下一代基料/包装设计和制造中具有成本效益的CMP平面化
3. Milestone Report for High NA Optics Development International Sematech Project L1TH 112 Milestone4a: Specification Package for the Polished Mirror Substrate M1 [O] . Taylor, J.S., Hale, L. 1999

机译：高Na光学开发的里程碑报告国际sematech项目L1TH 112 milestone4a：抛光镜面基板的规格包m1

Milestone Report for High NA Optics Development International Sematech Project L1TH 112 Milestone4a: Specification Package for the Polished Mirror Substrate M1

摘要

著录项

相似文献

相关主题

期刊订阅