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Spatially Resolved Atomic and Molecular Spectroscopy in Microelectronics Processing Plasmas

机译：微电子加工等离子体中的空间分辨原子和分子光谱

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Plasma processing of microelectronic materials is strongly dependent on the generation and control of neutral radial and ion species generated in a plasma. This abstract reviews our recent measurements of the spatial distribution of several important atomic and molecular species in inductively coupled plasmas through Cl2/BCl2/Ar-containing gas mixtures. Measured species include the ground state Cl and BCl densities as well as the metastable argon density. The focus of this review is on the experimental techniques and results. In addition to assisting in the development of a fundamental understanding of the important plasma physics, these measurements have been used to benchmark multi-dimensional plasma discharge codes.

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作者
Hebner, G. A.;
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年度 1998
页码 1-27
总页数 27
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Plasma; Microelectronics; Atomic Spectroscopy; Molecular spectroscopy;

机译：等离子体;微电子学;原子光谱学;分子光谱学;

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专利

1. Spatially resolved H_α-emission simulation with EIRENE in TJ-II to study hydrogen atomic and molecular physics in low density, high temperature fusion edge plasmas [J] . E. de la Cal, J. Guasp, A. Salas, Nuclear fusion . 2008,第9期

机译：用EIRENE在TJ-II中进行空间分辨H_α发射模拟，以研究低密度，高温聚变边缘等离子体中的氢原子和分子物理学
2. Spatially-Resolved Remote Plasma Atomic Layer Deposition Process for Moisture Barrier Al2O3 Films [J] . Yong Sang Heon, Kim Sun Jung, Cho Sung Min, Journal of the Korean Physical Society . 2018,第1期

机译：用于防潮屏障Al2O3薄膜的空间分辨远程等离子体原子层沉积工艺
3. A novel method of using the OES line ratio to determine the spatially resolved atomic density in low-temperature plasmas and its application in carbon and aluminium atoms in capacitively coupled plasmas [J] . Li J., Zhu X.-M., Pu Y.-K. Journal of Physics, D. Applied Physics: A Europhysics Journal . 2011,第45期

机译：利用OES线比确定低温等离子体中空间分辨的原子密度的新方法及其在电容耦合等离子体中的碳原子和铝原子中的应用
4. Atomic and Molecular Collisional Radiative Modeling for Spectroscopy of Low Temperature and Magnetic Fusion Plasmas [C] . U. Fantz, D. Wunderlich International Conference on Atomic and Molecular Data and Their Applications . 2011

机译：低温和磁融合等离子体光谱学的原子和分子碰撞辐射建模
5. High precision and spatial analysis of platinum, palladium, and rhodium in catalytic converters by inductively coupled plasma atomic emission spectroscopy and inductively coupled plasma mass spectrometry. [D] . Pennebaker, Frank Martin. 1998

机译：通过电感耦合等离子体原子发射光谱法和电感耦合等离子体质谱法对催化转化器中的铂，钯和铑进行高精度和空间分析。
6. Spatially Localized Two-Dimensional J-Resolved NMR Spectroscopy via Intermolecular Double-Quantum Coherences for Biological Samples at 7 T [O] . Chunhua Tan, Shuhui Cai, Yuqing Huang -1

机译：通过分子间双量子相干性在7 T时通过分子间双量子相干空间定位的二维J分辨NMR光谱
7. Time-Resolved Emission Spectroscopy of Atomic and Molecular Species in Laser-Induced Plasma [O] . Christian Parigger, Ghaneshwar Gautam, Christopher M Helstern 2018

机译：激光诱导等离子体中原子和分子种类的时间分离的发射光谱

Spatially Resolved Atomic and Molecular Spectroscopy in Microelectronics Processing Plasmas

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