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Impact of Solid-Phase Crystallization of Amorphous Silicon on the Chemical Structure of the Buried Si/ZnO Thin Film Solar Cell Interface.

机译：非晶硅固相结晶对埋地si / ZnO薄膜太阳能电池界面化学结构的影响。

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The chemical interface structure between phosphorus-doped hydrogenated amorphous silicon and aluminum-doped zinc oxide thin films is investigated with soft x-ray emission spectroscopy (XES) before and after solid-phase crystallization (SPC) at 600C. In addition to the expected SPC-induced phase transition from amorphous to polycrystalline silicon, our XES data indicates a pronounced chemical interaction at the buried Si/ZnO interface. In particular, we find an SPC-enhanced formation of Si-O bonds and the accumulation of Zn in close proximity to the interface. For an assumed closed and homogeneous SiO2 interlayer, an effective thickness of (5+2)nm after SPC could be estimated.

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作者
Bar, M.; Wimmer, M.; Wilks, R. G.; Roczen, M.;
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年度 2011
页码 1-4
总页数 4
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Solar cells; Zinc oxides; Aluminum; Crystallization; Emission spectroscopy; Materials science; Phosphorus; Silicon; Soft x-radiation; Thin films;

机译：太阳能电池;氧化锌;铝;结晶;发射光谱;材料科学;磷;硅;软x射线;薄膜;

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专利

1. Impact of solid-phase crystallization of amorphous silicon on the chemical structure of the buried Si/ZnO thin film solar cell interface [J] . Bar M., Wimmer M., Wilks R. G., Applied Physics Letters . 2010,第7期

机译：非晶硅固相结晶对埋Si / ZnO薄膜太阳能电池界面化学结构的影响
2. Impact of solid-phase crystallization of amorphous silicon on the chemical structure of the buried Si/ZnO thin film solar cell interface [J] . M. Baer, rnM. Wimmer, rnR. G. Wilks, Applied Physics Letters . 2010,第7期

机译：非晶硅固相结晶对埋Si / ZnO薄膜太阳能电池界面化学结构的影响
3. Solid-phase crystallization of amorphous silicon on ZnO:Al for thin-film solar cells [J] . Becker C., Conrad E., Dogan P., Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion . 2009,第6a7期

机译：用于薄膜太阳能电池的ZnO：Al上非晶硅的固相结晶
4. Study on light scattering of rf sputtered ZnO:Al thin films as a front electrode of amorphous silicon thin film solar cells [C] . Jun-Sik Cho, Young Jin Kim, Jeong Chul Lee, Photovoltaic Specialists Conference (PVSC), 2009 . 2009

机译：射频溅射ZnO：Al薄膜作为非晶硅薄膜太阳能电池前电极的光散射研究
5. Amorphous and microcrystalline silicon thin films grown by photon assisted electron cyclotron resonance chemical vapor deposition for heterojunction solar cells and thin film transistors. [D] . Song, Young Joo. 2000

机译：通过光子辅助的电子回旋共振化学气相沉积法生长的非晶和微晶硅薄膜，用于异质结太阳能电池和薄膜晶体管。
6. Role of SiNx Barrier Layer on the Performances of Polyimide Ga2O3-doped ZnO p-i-n Hydrogenated Amorphous Silicon Thin Film Solar Cells [O] . Fang-Hsing Wang, Hsin-Hui Kuo, Cheng-Fu Yang, 2014

机译：SiNx阻挡层对聚酰亚胺Ga2O3掺杂的ZnO p-i-n氢化非晶硅薄膜太阳能电池性能的影响
7. Characterization of evaporated solid-phase crystallized silicon thin-film solar cells on glass [O] . Liu F, AlJassim MM, Kunz O, 2009

机译：在玻璃上表征蒸发的固相结晶硅薄膜太阳能电池

Impact of Solid-Phase Crystallization of Amorphous Silicon on the Chemical Structure of the Buried Si/ZnO Thin Film Solar Cell Interface.

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