Environmentally friendly polysilane photoresists

机译：环保型聚硅烷光刻胶

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Several novel polysilanes synthesized by the free-radical hydrosilation of oligomeric polyphenylsilane or poly(p-tert- butylphenylsilane) were examined for lithographic behavior. This recently developed route into substituted polysilanes has allowed for the rational design of a variety of polysilanes with a typical chemical properties such as alcohol and aqueous base solubility. Many of the polysilane resists made could be developed in aqueous sodium carbonate and bicarbonate solutions. These materials represent environmentally friendly polysilane resists in both their synthesis and processing.

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Beach, J. V. ; Loy, D. A. ; Hsiao, Y. L. ; Waymouth, R. M.;
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年度 1995
页码 1-14
总页数 14
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Masking; Polymers; Silanes; Meetings;

机译：掩蔽;聚合物;硅烷;会议;

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专利

1. Towards environmentally friendly, dry deposited, water developable molecular glass photoresists [J] . Frauke Pfeiffer, Nelson M. Felix, Christian Neuber Physical chemistry chemical physics: PCCP . 2008,第9期

机译：迈向环保，干法沉积，可水显影的分子玻璃光刻胶
2. Toward Environmentally Friendly Photolithographic Materials: A New Class of Water-Soluble Photoresists [J] . Shintaro Yamada, Thomas Mrozek, Timo Rager, Macromolecules . 2004,第2期

机译：迈向环保型光刻材料：新型水溶性光刻胶
3. An Environmentally Friendly Water-Developable Positive Photoresist Using LB Films Fabricated from Methacrylamide Copolymers [J] . Yinzhong Guo, Fei Feng, Tokuji Miyashita Bulletin of the Chemical Society of Japan . 1999,第10期

机译：使用甲基丙烯酰胺共聚物制成的LB膜对环境友好的水显影型正性光刻胶
4. Negative-tone development of photoresists in environmentally friendly silicone fluids [C] . Christine Y. Ouyang, Christopher K. Ober Advances in resist materials and processing technology XXIX. . 2012

机译：环保型硅油中光刻胶的负显影
5. Green technology towards pharmaceutical drug development: I. Synthesis of differentially functionalized hydroquinone as an important pharmaceutical intermediate. II. Application in green chemistry: Environmentally friendly cleavage of aromatic ethers and trans-etherification under neutral conditions. III. Environmentally friendly simple amidation of nitro compounds: One step synthesis of acetaminophen. [D] . Tichkule, Ritesh. 2004

机译：面向药物开发的绿色技术：I.合成功能不同的对苯二酚作为重要的药物中间体。二。在绿色化学中的应用：在中性条件下对芳族醚进行环境友好的裂解和反式醚化。三，硝基化合物的环保简单酰胺化：对乙酰氨基酚的一步合成。
6. In Situ Subcellular Detachment of Cells Using a Cell‐Friendly Photoresist and Spatially Modulated Light [O] . Jeehun Park, Taeyup Kim, Jong Chul Choi, 2019

机译：使用细胞友好的光致抗蚀剂和空间调制的光原位细胞的细胞分离。
7. Polysilane photoresists for 193 and 248nm lithography. [O] . G. M. Wallraff, R. D. Miller, M. Baier, 1992

机译：聚硅烷光致抗蚀剂193和248nm光刻。

Environmentally friendly polysilane photoresists

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