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Amorphous diamond-like carbon film growth by KrF- and ArF- excimer laser PLD: Correlation with plume properties

机译：通过KrF-和arF-准分子激光pLD生长无定形类金刚石碳膜：与羽流特性的相关性

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A comparative study of ArF- and KrF-laser deposition of amorphous diamond-like carbon (DLC) films and relevant carbon plasmas has been performed. Spectroscopic ellipsometry and EELS analysis of the DLC films deposited on Si <100> and NaCl substrates were utilized to characterize the high quality ArF- and KrF-laser deposited films (up to 84% of sp(sup 3) bonded carbon in 7 J/cm(sup 2) -ArF-laser DLC film). Gated ICCD imaging, luminescence and ion current probe diagnostics of the carbon plume have revealed quite different properties of carbon plasmas generated by ArF- and KrF- lasers. KrF-laser (6.7 J/cm(sup 2)) irradiation produces a less energetic carbon plasma containing larger amounts of C(sub 2) and probably larger clusters compared with ArF-laser irradiation at the same energy fluence. We conclude that the more energetic and highly-atomized ArF-laser carbon plasma results in the better diamond-like properties.

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Puretzky, A. A. ; Geohegan, D. B. ; Jellison, G. E.;
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年度 1995
页码 1-8
总页数 8
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Carbon; Crystal Growth; Crystal Structure; Deposition; Excimer Lasers; Films; Krypton Fluoride Lasers; Luminescence; Plasma; Meetings;

机译：碳;晶体生长;晶体结构;沉积;准分子激光;薄膜;氪氟化物激光;发光;等离子体;会议;

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1. Femtosecond pulsed laser deposition and optical properties of diamond-like amorphous carbon films embedded with sp-bonded carbon chains [J] . Anming Hu, M. Rybachuk, Qing-Bin Lu Diamond and Related Materials . 2008,第7a10期

机译：飞秒脉冲激光沉积和嵌入sp键合碳链的类金刚石无定形碳膜的光学性质
2. Correlations between microstructure and hydrophobicity properties of pulsed laser deposited diamond-like carbon films [J] . A. Modabber Asl, P. Kameli, M. Ranjbar, Superlattices and microstructures . 2015,第may期

机译：脉冲激光沉积类金刚石碳膜的微观结构与疏水性之间的相关性
3. The correlation between optical and mechanical properties of amorphous diamond-like carbon films prepared by pulsed filtered cathodic vacuum arc deposition [J] . Konkhunthot Natthaphong, Tunmee Sarayut, Zhou XiaoLong, Thin Solid Films . 2018,第MAYa1期

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4. Comparative diagnostics of ArF- and KrF-laser generated carbon plumes used for amorphous diamond-like carbon film deposition~1,2 [C] . A.A.Puretzky, D.B.Geohegan, G.E.Jellison Jr., Symposium F: international conference on laser ablation . 1996

机译：用于无定形金刚石状碳膜沉积的ARF和KRF激光激光产生的碳羽膜的比较诊断〜1,2
5. Excimer laser-induced crystallization of amorphous cadmium selenide thin films. [D] . Shaffer, Etienne. 2007

机译：准分子激光诱导非晶硒化镉薄膜的结晶。
6. Nanostructure Formation on Diamond-Like Carbon Films Induced with Few-Cycle Laser Pulses at Low Fluence from a Ti:Sapphire Laser Oscillator [O] . Seiya Nikaido, Takumi Natori, Ryo Saito, 2018

机译：Ti：蓝宝石激光振荡器在低通量下由少周期激光脉冲在类金刚石碳膜上形成纳米结构。
7. Comparative diagnostics of ArF- and KrF-laser generated carbon plumes used for amorphous diamond-like carbon film deposition [O] . A.A. Puretzky, D.B. Geohegan, G.E. Jellison, 1996

机译：用于无定形金刚石状碳膜沉积的ARF和KRF激光产生的碳羽膜的比较诊断

Amorphous diamond-like carbon film growth by KrF- and ArF- excimer laser PLD: Correlation with plume properties

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