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Hardware platforms for MEMS gyroscope tuning based on evolutionary computation using open-loop and closed -loop frequency response

机译：基于使用开环和闭环频率响应的演化计算的mEms陀螺仪调谐的硬件平台

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摘要

We propose a tuning method for MEMS gyroscopes based on evolutionary computation to efficiently increase the sensitivity of MEMS gyroscopes through tuning. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation. We also report on the development of a hardware platform for integrated tuning and closed loop operation of MEMS gyroscopes. The control of this device is implemented through a digital design on a Field Programmable Gate Array (FPGA). The hardware platform easily transitions to an embedded solution that allows for the miniaturization of the system to a single chip.

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Keymeulen, Didier; Ferguson, Michael I.; Fink, Wolfgang; Oks, Boris; Peay, Chris; Terrile, Richard; Cheng, Yen; Kim, Dennis; MacDonald, Eric; Foor, David;
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年度 2005
页码 1-12
总页数 12
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
CHIPS; COMPUTATION; EMBEDDING; FEEDBACK CONTROL; FIELD-PROGRAMMABLE GATE ARRAYS; FREQUENCY MEASUREMENT; FREQUENCY RESPONSE; GENETICS; GYROSCOPES; MICROELECTROMECHANICAL SYSTEMS; MINIATURIZATION; RESONATORS; SENSITIVITY; TUNING; evolvable hardware; gryroscope; genetic algorithms; simulated annealing; MEMS;

机译：芯片;计算;埋藏;反馈控制;现场可编程门阵列;频率测量;频率响应;遗传学;陀螺仪;微电子机械系统;微型化;谐振器;灵敏度; TUNING;可演化的硬件; gryroscope;遗传算法;模拟退火; mEms;

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专利

1. Establishment of All Digital Closed-Loop Interferometric Fiber-Optic Gyroscope and Scale Factor Comparison for Open-Loop and All Digital Closed-Loop Configurations [J] . Celikel O., San S. E. IEEE sensors journal . 2009,第2期

机译：全数字闭环干涉式光纤陀螺仪的建立以及开环和全数字闭环配置的比例因子比较
2. A simple connection between closed-loop transient response and open-loop frequency response [J] . West J.C., Potts J. Electrical Engineers, Journal of the Institution of . 1953,第6期

机译：闭环瞬态响应和开环频率响应之间的简单连接
3. A simple connection between closed-loop transient response and open-loop frequency response [J] . West J.C., Potts J. Proceedings of the IEE - Part II: Power Engineering . 1953,第75期

机译：闭环瞬态响应和开环频率响应之间的简单连接
4. Hardware Platforms for MEMS Gyroscope Tuning Based on Evolutionary Computation Using Open-Loop and Closed-Loop Frequency Response [C] . Didier Keymeulen, Michael I. Ferguson, Wolfgang Fink, International Conference on Evolvable Systems: From Biology to Hardware(ICES 2005); 20050912-14; Sitges(ES) . 2005

机译：基于开环和闭环频率响应的进化计算的MEMS陀螺仪调谐硬件平台
5. On the application of active open-loop and closed-loop controls on a circular cylinder in the presence and absence of a free surface. [D] . Reid, Gina S. 2010

机译：在有和没有自由表面的情况下将主动控制和闭环控制应用到圆柱上。
6. A Digital Closed-Loop Sense MEMS Disk Resonator Gyroscope Circuit Design Based on Integrated Analog Front-end [O] . Yihang Wang, Qiang Fu, Yufeng Zhang, 2020

机译：基于集成模拟前端的数字闭环传感MEMS磁盘谐振陀螺仪电路设计
7. Hardware Platforms for MEMS Gyroscope Tuning based on Evolutionary Computation using Open-Loop and Closed-Loop Frequency Response [O] . Didier Keymeulenl, Michael I. Fergusonl, Wolfgang Fink, 2015

机译：基于进化计算的开环和闭环频率响应的mEms陀螺仪调谐硬件平台
8. A Hardware Platform for Tuning of MEMS Devices Using Closed-Loop Frequency Response [R] . Ferguson, Michael I., MacDonald, Eric, Foor, David 2005

机译：利用闭环频率响应调整mEms器件的硬件平台

Hardware platforms for MEMS gyroscope tuning based on evolutionary computation using open-loop and closed -loop frequency response

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