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Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT Unimorph Actuators

机译：大孔径可变形反射镜，带有转移的单晶硅膜，采用大行程pZT单晶片执行器驱动

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We have demonstrated a large aperture (50 mm x 50 mm) continuous membrane deformable mirror (DM) with a large-stroke piezoelectric unimorph actuator array. The DM consists of a continuous, large aperture, silicon membrane 'transferred' in its entirety onto a 20 x 20 piezoelectric unimorph actuator array. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5.7 [m at 20V. An assembled DM showed an operating frequency bandwidth of 30 kHz and influence function of approximately 30.

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Hishinumat, Yoshikazu; Yang, Eui - Hyeok (EH);
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年度 2005
页码 1-8
总页数 8
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
ACTUATORS; APERTURES; BANDWIDTH; DEFLECTION; DEFORMABLE MIRRORS; FREQUENCIES; MEMBRANES; PIEZOELECTRICITY; SILICON; SINGLE CRYSTALS; THICKNESS; Piezoelectric unimorph actuators; unimorph; actuators; Deformable mirrors; mirror;

机译：动器;小孔;带宽;偏转;可变形镜;频点;滤膜;压电;硅;单晶;厚度;压电单压电晶片执行器;单晶片;执行器;可变形镜子;镜子;

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专利

1. Thin-Film Piezoelectric Unimorph Actuator-Based Deformable Mirror With a Transferred Silicon Membrane [J] . Yang E.-H., Hishinuma Y., Cheng J.-G., Journal of Microelectromechanical Systems . 2006,第期

机译：基于薄膜压电单压电晶片致动器的可变形反射镜，带有转移的硅膜
2. Piezoelectric Unimorph Microactuator Arrays for Single-Crystal Silicon Continuous-Membrane Deformable Mirror [J] . Yoshikazu Hishinuma, Eui-Hyeok (EH) Yang Journal of Microelectromechanical Systems . 2006,第2期

机译：用于单晶硅连续膜可变形镜的压电Unimorph微致动器阵列
3. Woofer-tweeter deformable mirror driven by combined actuators with a piezoelectric unimorph and stack for astronomical application [J] . Chen Junjie, Ma Jianqiang, Zuo Heng, Applied optics . 2019,第9期

机译：由组合执行器驱动的低音扬声器 - 高音扬声器可通过带压电维护和堆叠的用于天文应用
4. Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT unimorph actuators [C] . Hishinuma, Y., Eui-Hyeok Yang . 2005

机译：大孔径可变形反射镜，带有通过大行程PZT单压电晶片致动器致动的转移单晶硅膜
5. Lightweight in-plane actuated deformable mirrors for space telescopes. [D] . Shepherd, Michael J. 2006

机译：用于太空望远镜的轻型平面致动可变形反射镜。
6. Antagonist Concepts of Polypyrrole Actuators: Bending Hybrid Actuator and Mirrored Trilayer Linear Actuator [O] . Rudolf Kiefer, Ngoc Tuan Nguyen, Quoc Bao Le, 2021

机译：Polypyrol执行器的拮抗剂概念：弯曲混合动力执行器和镜像三层线性执行器
7. Concept, Modeling and Fabrication Techniques for Large-Stroke Piezoelectric Unimorph Deformable Mirrors [O] . Eui-hyeok Yang, Kirill Shcheglov, Susan Trolier-mckinstryb 2014

机译：大冲程压电单压电晶片可变形反射镜的概念，建模与制作技术
8. Single-crystal silicon continuous membrane deformable mirror with PZT unimorph microactuator arrays [R] . Hishinuma, Yoshikazu, Yang, Eui-Hyeok 2004

机译：具有pZT单晶微致动器阵列的单晶硅连续膜可变形镜

Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT Unimorph Actuators

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