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Reliable Method for Testing Gross Leaks in Semiconductor Component Packages

机译：用于测试半导体元件封装中总泄漏的可靠方法

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The report discusses improved testing methods for detecting gas-tightness of hermetic seals for encapsulated semiconductor devices.

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年度 1968
页码 p.1-22
总页数 22
原文格式 PDF
正文语种 eng
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关键词
Semiconductor devices ; Defects(Materials) ; Helium ; Hermetic seals ; Leakage(Fluid) ; Leak detectors ; Reliability ; Gas flow ; Spectroscopy ; Costs ; Liquefied gases ; Liquid immersion tests;

机译：半导体器件;缺陷（材料）;氦气;气密密封;泄漏（流体）;泄漏探测器;可靠性;气体流动;光谱学;成本;液化气体;液体浸泡测试;

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Reliable Method for Testing Gross Leaks in Semiconductor Component Packages

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